1/11/2011	1:20:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	1:20:22 AM	Recipe started at 1:20 AM
1/11/2011	1:20:22 AM	Helium valve closed
1/11/2011	1:20:22 AM	H2 valve closed
1/11/2011	1:20:22 AM	BCl3 valve closed
1/11/2011	1:20:22 AM	PH3 valve closed
1/11/2011	1:20:22 AM	SiCl4 pre valve closed
1/11/2011	1:20:22 AM	SiCl4 post valve closed
1/11/2011	1:20:22 AM	Main Vac valve closed
1/11/2011	1:20:22 AM	Bypass valve closed
1/11/2011	1:20:22 AM	Bubbler valve closed
1/11/2011	1:20:22 AM	Helium MFC set to  0.000000
1/11/2011	1:20:22 AM	H2 MFC set to  0.000000
1/11/2011	1:20:22 AM	BCl3 MFC set to  0.000000
1/11/2011	1:20:22 AM	PHl3 MFC set to  0.000000
1/11/2011	1:20:22 AM	SiCl4 MFC set to  0.000000
1/11/2011	1:20:22 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:20:23 AM	Tube furnace set to 0
1/11/2011	1:20:23 AM	Run finished at 1:20 AM
1/11/2011	1:20:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	1:20:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	1:20:44 AM	Recipe started at 1:20 AM
1/11/2011	1:20:44 AM	Helium valve closed
1/11/2011	1:20:44 AM	H2 valve closed
1/11/2011	1:20:44 AM	BCl3 valve closed
1/11/2011	1:20:44 AM	PH3 valve closed
1/11/2011	1:20:44 AM	SiCl4 pre valve closed
1/11/2011	1:20:44 AM	SiCl4 post valve closed
1/11/2011	1:20:44 AM	Main Vac valve closed
1/11/2011	1:20:44 AM	Bubbler valve closed
1/11/2011	1:20:44 AM	Bypass valve opened
1/11/2011	1:20:44 AM	Helium MFC set to  0.000000
1/11/2011	1:20:44 AM	H2 MFC set to  0.000000
1/11/2011	1:20:44 AM	BCl3 MFC set to  0.000000
1/11/2011	1:20:44 AM	PHl3 MFC set to  0.000000
1/11/2011	1:20:44 AM	SiCl4 MFC set to  0.000000
1/11/2011	1:20:44 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:20:44 AM	Tube furnace set to 0
1/11/2011	1:20:44 AM	Helium valve closed
1/11/2011	1:20:44 AM	H2 valve closed
1/11/2011	1:20:44 AM	BCl3 valve closed
1/11/2011	1:20:44 AM	PH3 valve closed
1/11/2011	1:20:44 AM	SiCl4 pre valve closed
1/11/2011	1:20:44 AM	SiCl4 post valve closed
1/11/2011	1:20:44 AM	Bubbler valve closed
1/11/2011	1:20:44 AM	Main Vac valve opened
1/11/2011	1:20:44 AM	Bypass valve opened
1/11/2011	1:20:44 AM	Helium MFC set to  0.000000
1/11/2011	1:20:44 AM	H2 MFC set to  0.000000
1/11/2011	1:20:44 AM	BCl3 MFC set to  0.000000
1/11/2011	1:20:44 AM	PHl3 MFC set to  0.000000
1/11/2011	1:20:44 AM	SiCl4 MFC set to  0.000000
1/11/2011	1:20:44 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:20:44 AM	Tube furnace set to 0
1/11/2011	1:20:45 AM	Run finished at 1:20 AM
1/11/2011	1:20:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	1:21:12 AM	Recipe started at 1:21 AM
1/11/2011	1:21:12 AM	Helium valve closed
1/11/2011	1:21:12 AM	BCl3 valve closed
1/11/2011	1:21:12 AM	PH3 valve closed
1/11/2011	1:21:12 AM	SiCl4 pre valve closed
1/11/2011	1:21:12 AM	SiCl4 post valve closed
1/11/2011	1:21:12 AM	Main Vac valve closed
1/11/2011	1:21:12 AM	Bypass valve closed
1/11/2011	1:21:12 AM	Bubbler valve closed
1/11/2011	1:21:12 AM	H2 valve opened
1/11/2011	1:21:12 AM	Helium MFC set to  0.000000
1/11/2011	1:21:12 AM	H2 MFC set to  500.000000
1/11/2011	1:21:12 AM	BCl3 MFC set to  0.000000
1/11/2011	1:21:12 AM	PHl3 MFC set to  0.000000
1/11/2011	1:21:12 AM	SiCl4 MFC set to  0.000000
1/11/2011	1:21:12 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:21:12 AM	Tube furnace set to 0
1/11/2011	1:22:35 AM	Helium valve closed
1/11/2011	1:22:35 AM	BCl3 valve closed
1/11/2011	1:22:35 AM	PH3 valve closed
1/11/2011	1:22:35 AM	SiCl4 pre valve closed
1/11/2011	1:22:35 AM	SiCl4 post valve closed
1/11/2011	1:22:35 AM	Main Vac valve closed
1/11/2011	1:22:35 AM	Bypass valve closed
1/11/2011	1:22:35 AM	H2 valve opened
1/11/2011	1:22:35 AM	Bubbler valve opened
1/11/2011	1:22:35 AM	Helium MFC set to  0.000000
1/11/2011	1:22:35 AM	H2 MFC set to  500.000000
1/11/2011	1:22:35 AM	BCl3 MFC set to  0.000000
1/11/2011	1:22:35 AM	PHl3 MFC set to  0.000000
1/11/2011	1:22:35 AM	SiCl4 MFC set to  0.000000
1/11/2011	1:22:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:22:35 AM	Tube furnace set to 1000
1/11/2011	1:42:35 AM	Helium valve closed
1/11/2011	1:42:35 AM	PH3 valve closed
1/11/2011	1:42:35 AM	Main Vac valve closed
1/11/2011	1:42:35 AM	Bypass valve closed
1/11/2011	1:42:35 AM	H2 valve opened
1/11/2011	1:42:35 AM	BCl3 valve opened
1/11/2011	1:42:35 AM	SiCl4 pre valve opened
1/11/2011	1:42:35 AM	SiCl4 post valve opened
1/11/2011	1:42:35 AM	Bubbler valve opened
1/11/2011	1:42:35 AM	Helium MFC set to  0.000000
1/11/2011	1:42:35 AM	H2 MFC set to  500.000000
1/11/2011	1:42:35 AM	BCl3 MFC set to  1.800000
1/11/2011	1:42:35 AM	PHl3 MFC set to  0.000000
1/11/2011	1:42:35 AM	SiCl4 MFC set to  50.000000
1/11/2011	1:42:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	1:42:35 AM	Tube furnace set to 1000
1/11/2011	2:05:35 AM	H2 valve closed
1/11/2011	2:05:35 AM	BCl3 valve closed
1/11/2011	2:05:35 AM	PH3 valve closed
1/11/2011	2:05:35 AM	SiCl4 pre valve closed
1/11/2011	2:05:35 AM	SiCl4 post valve closed
1/11/2011	2:05:35 AM	Main Vac valve closed
1/11/2011	2:05:35 AM	Bypass valve closed
1/11/2011	2:05:35 AM	Helium valve opened
1/11/2011	2:05:35 AM	Bubbler valve opened
1/11/2011	2:05:35 AM	Helium MFC set to  500.000000
1/11/2011	2:05:35 AM	H2 MFC set to  0.000000
1/11/2011	2:05:35 AM	BCl3 MFC set to  0.000000
1/11/2011	2:05:35 AM	PHl3 MFC set to  0.000000
1/11/2011	2:05:35 AM	SiCl4 MFC set to  0.000000
1/11/2011	2:05:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	2:05:35 AM	Tube furnace set to 0
1/11/2011	2:25:35 AM	Helium valve closed
1/11/2011	2:25:35 AM	H2 valve closed
1/11/2011	2:25:35 AM	BCl3 valve closed
1/11/2011	2:25:35 AM	PH3 valve closed
1/11/2011	2:25:35 AM	SiCl4 pre valve closed
1/11/2011	2:25:35 AM	SiCl4 post valve closed
1/11/2011	2:25:35 AM	Main Vac valve closed
1/11/2011	2:25:35 AM	Bypass valve closed
1/11/2011	2:25:35 AM	Bubbler valve closed
1/11/2011	2:25:35 AM	Helium MFC set to  0.000000
1/11/2011	2:25:35 AM	H2 MFC set to  0.000000
1/11/2011	2:25:35 AM	BCl3 MFC set to  0.000000
1/11/2011	2:25:35 AM	PHl3 MFC set to  0.000000
1/11/2011	2:25:35 AM	SiCl4 MFC set to  0.000000
1/11/2011	2:25:35 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	2:25:36 AM	Tube furnace set to 0
1/11/2011	2:25:36 AM	Run finished at 2:25 AM
1/11/2011	3:08:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	3:08:42 AM	Recipe started at 3:08 AM
1/11/2011	3:08:42 AM	H2 valve closed
1/11/2011	3:08:42 AM	BCl3 valve closed
1/11/2011	3:08:42 AM	PH3 valve closed
1/11/2011	3:08:42 AM	SiCl4 pre valve closed
1/11/2011	3:08:42 AM	SiCl4 post valve closed
1/11/2011	3:08:42 AM	Main Vac valve closed
1/11/2011	3:08:42 AM	Bypass valve closed
1/11/2011	3:08:42 AM	Bubbler valve closed
1/11/2011	3:08:42 AM	Helium valve opened
1/11/2011	3:08:42 AM	Helium MFC set to  500.000000
1/11/2011	3:08:43 AM	H2 MFC set to  0.000000
1/11/2011	3:08:43 AM	BCl3 MFC set to  0.000000
1/11/2011	3:08:43 AM	PHl3 MFC set to  0.000000
1/11/2011	3:08:43 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:08:43 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:08:43 AM	Tube furnace set to 0
1/11/2011	3:08:49 AM	Helium valve closed
1/11/2011	3:08:49 AM	H2 valve closed
1/11/2011	3:08:49 AM	BCl3 valve closed
1/11/2011	3:08:49 AM	PH3 valve closed
1/11/2011	3:08:49 AM	SiCl4 pre valve closed
1/11/2011	3:08:49 AM	SiCl4 post valve closed
1/11/2011	3:08:49 AM	Main Vac valve closed
1/11/2011	3:08:49 AM	Bypass valve closed
1/11/2011	3:08:49 AM	Bubbler valve closed
1/11/2011	3:08:49 AM	Helium MFC set to  0.000000
1/11/2011	3:08:49 AM	H2 MFC set to  0.000000
1/11/2011	3:08:49 AM	BCl3 MFC set to  0.000000
1/11/2011	3:08:49 AM	PHl3 MFC set to  0.000000
1/11/2011	3:08:49 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:08:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:08:49 AM	Tube furnace set to 0
1/11/2011	3:08:50 AM	Run finished at 3:08 AM
1/11/2011	3:08:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	3:18:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	3:18:38 AM	Recipe started at 3:18 AM
1/11/2011	3:18:38 AM	Helium valve closed
1/11/2011	3:18:38 AM	H2 valve closed
1/11/2011	3:18:38 AM	BCl3 valve closed
1/11/2011	3:18:38 AM	PH3 valve closed
1/11/2011	3:18:38 AM	SiCl4 pre valve closed
1/11/2011	3:18:38 AM	SiCl4 post valve closed
1/11/2011	3:18:38 AM	Main Vac valve closed
1/11/2011	3:18:38 AM	Bubbler valve closed
1/11/2011	3:18:38 AM	Bypass valve opened
1/11/2011	3:18:38 AM	Helium MFC set to  0.000000
1/11/2011	3:18:38 AM	H2 MFC set to  0.000000
1/11/2011	3:18:38 AM	BCl3 MFC set to  0.000000
1/11/2011	3:18:38 AM	PHl3 MFC set to  0.000000
1/11/2011	3:18:38 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:18:38 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:18:38 AM	Tube furnace set to 0
1/11/2011	3:19:41 AM	Helium valve closed
1/11/2011	3:19:41 AM	H2 valve closed
1/11/2011	3:19:41 AM	BCl3 valve closed
1/11/2011	3:19:41 AM	PH3 valve closed
1/11/2011	3:19:41 AM	SiCl4 pre valve closed
1/11/2011	3:19:41 AM	SiCl4 post valve closed
1/11/2011	3:19:41 AM	Bubbler valve closed
1/11/2011	3:19:41 AM	Main Vac valve opened
1/11/2011	3:19:41 AM	Bypass valve opened
1/11/2011	3:19:41 AM	Helium MFC set to  0.000000
1/11/2011	3:19:41 AM	H2 MFC set to  0.000000
1/11/2011	3:19:41 AM	BCl3 MFC set to  0.000000
1/11/2011	3:19:41 AM	PHl3 MFC set to  0.000000
1/11/2011	3:19:41 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:19:41 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:19:41 AM	Tube furnace set to 0
1/11/2011	3:19:42 AM	Run finished at 3:19 AM
1/11/2011	3:19:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	3:23:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	3:23:57 AM	Recipe started at 3:23 AM
1/11/2011	3:23:57 AM	Helium valve closed
1/11/2011	3:23:57 AM	H2 valve closed
1/11/2011	3:23:57 AM	BCl3 valve closed
1/11/2011	3:23:57 AM	PH3 valve closed
1/11/2011	3:23:57 AM	SiCl4 pre valve closed
1/11/2011	3:23:57 AM	SiCl4 post valve closed
1/11/2011	3:23:57 AM	Main Vac valve closed
1/11/2011	3:23:57 AM	Bubbler valve closed
1/11/2011	3:23:57 AM	Bypass valve opened
1/11/2011	3:23:57 AM	Helium MFC set to  0.000000
1/11/2011	3:23:57 AM	H2 MFC set to  0.000000
1/11/2011	3:23:57 AM	BCl3 MFC set to  0.000000
1/11/2011	3:23:57 AM	PHl3 MFC set to  0.000000
1/11/2011	3:23:57 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:23:57 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:23:57 AM	Tube furnace set to 0
1/11/2011	3:23:57 AM	Helium valve closed
1/11/2011	3:23:57 AM	H2 valve closed
1/11/2011	3:23:57 AM	BCl3 valve closed
1/11/2011	3:23:57 AM	PH3 valve closed
1/11/2011	3:23:57 AM	SiCl4 pre valve closed
1/11/2011	3:23:57 AM	SiCl4 post valve closed
1/11/2011	3:23:57 AM	Bubbler valve closed
1/11/2011	3:23:57 AM	Main Vac valve opened
1/11/2011	3:23:57 AM	Bypass valve opened
1/11/2011	3:23:57 AM	Helium MFC set to  0.000000
1/11/2011	3:23:57 AM	H2 MFC set to  0.000000
1/11/2011	3:23:57 AM	BCl3 MFC set to  0.000000
1/11/2011	3:23:57 AM	PHl3 MFC set to  0.000000
1/11/2011	3:23:57 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:23:57 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:23:57 AM	Tube furnace set to 0
1/11/2011	3:24:58 AM	H2 valve closed
1/11/2011	3:24:58 AM	BCl3 valve closed
1/11/2011	3:24:58 AM	PH3 valve closed
1/11/2011	3:24:58 AM	SiCl4 pre valve closed
1/11/2011	3:24:58 AM	SiCl4 post valve closed
1/11/2011	3:24:58 AM	Bubbler valve closed
1/11/2011	3:24:58 AM	Helium valve opened
1/11/2011	3:24:58 AM	Main Vac valve opened
1/11/2011	3:24:58 AM	Bypass valve opened
1/11/2011	3:24:58 AM	Helium MFC set to  100.000000
1/11/2011	3:24:58 AM	H2 MFC set to  0.000000
1/11/2011	3:24:58 AM	BCl3 MFC set to  0.000000
1/11/2011	3:24:58 AM	PHl3 MFC set to  0.000000
1/11/2011	3:24:58 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:24:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:24:58 AM	Tube furnace set to 0
1/11/2011	3:25:58 AM	Helium valve closed
1/11/2011	3:25:58 AM	H2 valve closed
1/11/2011	3:25:58 AM	BCl3 valve closed
1/11/2011	3:25:58 AM	PH3 valve closed
1/11/2011	3:25:58 AM	SiCl4 pre valve closed
1/11/2011	3:25:58 AM	SiCl4 post valve closed
1/11/2011	3:25:58 AM	Bubbler valve closed
1/11/2011	3:25:58 AM	Main Vac valve opened
1/11/2011	3:25:58 AM	Bypass valve opened
1/11/2011	3:25:58 AM	Helium MFC set to  0.000000
1/11/2011	3:25:58 AM	H2 MFC set to  0.000000
1/11/2011	3:25:58 AM	BCl3 MFC set to  0.000000
1/11/2011	3:25:58 AM	PHl3 MFC set to  0.000000
1/11/2011	3:25:58 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:25:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:25:58 AM	Tube furnace set to 0
1/11/2011	3:26:58 AM	H2 valve closed
1/11/2011	3:26:58 AM	BCl3 valve closed
1/11/2011	3:26:58 AM	PH3 valve closed
1/11/2011	3:26:58 AM	SiCl4 pre valve closed
1/11/2011	3:26:58 AM	SiCl4 post valve closed
1/11/2011	3:26:58 AM	Bubbler valve closed
1/11/2011	3:26:58 AM	Helium valve opened
1/11/2011	3:26:58 AM	Main Vac valve opened
1/11/2011	3:26:58 AM	Bypass valve opened
1/11/2011	3:26:58 AM	Helium MFC set to  100.000000
1/11/2011	3:26:58 AM	H2 MFC set to  0.000000
1/11/2011	3:26:58 AM	BCl3 MFC set to  0.000000
1/11/2011	3:26:58 AM	PHl3 MFC set to  0.000000
1/11/2011	3:26:58 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:26:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:26:58 AM	Tube furnace set to 0
1/11/2011	3:27:58 AM	Helium valve closed
1/11/2011	3:27:58 AM	H2 valve closed
1/11/2011	3:27:58 AM	BCl3 valve closed
1/11/2011	3:27:58 AM	PH3 valve closed
1/11/2011	3:27:58 AM	SiCl4 pre valve closed
1/11/2011	3:27:58 AM	SiCl4 post valve closed
1/11/2011	3:27:58 AM	Bubbler valve closed
1/11/2011	3:27:58 AM	Main Vac valve opened
1/11/2011	3:27:58 AM	Bypass valve opened
1/11/2011	3:27:58 AM	Helium MFC set to  0.000000
1/11/2011	3:27:58 AM	H2 MFC set to  0.000000
1/11/2011	3:27:58 AM	BCl3 MFC set to  0.000000
1/11/2011	3:27:58 AM	PHl3 MFC set to  0.000000
1/11/2011	3:27:58 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:27:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:27:58 AM	Tube furnace set to 0
1/11/2011	3:28:58 AM	H2 valve closed
1/11/2011	3:28:58 AM	BCl3 valve closed
1/11/2011	3:28:58 AM	PH3 valve closed
1/11/2011	3:28:58 AM	SiCl4 pre valve closed
1/11/2011	3:28:58 AM	SiCl4 post valve closed
1/11/2011	3:28:58 AM	Bubbler valve closed
1/11/2011	3:28:58 AM	Helium valve opened
1/11/2011	3:28:58 AM	Main Vac valve opened
1/11/2011	3:28:58 AM	Bypass valve opened
1/11/2011	3:28:58 AM	Helium MFC set to  100.000000
1/11/2011	3:28:58 AM	H2 MFC set to  0.000000
1/11/2011	3:28:58 AM	BCl3 MFC set to  0.000000
1/11/2011	3:28:58 AM	PHl3 MFC set to  0.000000
1/11/2011	3:28:58 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:28:58 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:28:58 AM	Tube furnace set to 0
1/11/2011	3:29:59 AM	Helium valve closed
1/11/2011	3:29:59 AM	H2 valve closed
1/11/2011	3:29:59 AM	BCl3 valve closed
1/11/2011	3:29:59 AM	PH3 valve closed
1/11/2011	3:29:59 AM	SiCl4 pre valve closed
1/11/2011	3:29:59 AM	SiCl4 post valve closed
1/11/2011	3:29:59 AM	Bubbler valve closed
1/11/2011	3:29:59 AM	Main Vac valve opened
1/11/2011	3:29:59 AM	Bypass valve opened
1/11/2011	3:29:59 AM	Helium MFC set to  0.000000
1/11/2011	3:29:59 AM	H2 MFC set to  0.000000
1/11/2011	3:29:59 AM	BCl3 MFC set to  0.000000
1/11/2011	3:29:59 AM	PHl3 MFC set to  0.000000
1/11/2011	3:29:59 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:29:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:29:59 AM	Tube furnace set to 0
1/11/2011	3:30:59 AM	H2 valve closed
1/11/2011	3:30:59 AM	BCl3 valve closed
1/11/2011	3:30:59 AM	PH3 valve closed
1/11/2011	3:30:59 AM	SiCl4 pre valve closed
1/11/2011	3:30:59 AM	SiCl4 post valve closed
1/11/2011	3:30:59 AM	Bubbler valve closed
1/11/2011	3:30:59 AM	Helium valve opened
1/11/2011	3:30:59 AM	Main Vac valve opened
1/11/2011	3:30:59 AM	Bypass valve opened
1/11/2011	3:30:59 AM	Helium MFC set to  100.000000
1/11/2011	3:30:59 AM	H2 MFC set to  0.000000
1/11/2011	3:30:59 AM	BCl3 MFC set to  0.000000
1/11/2011	3:30:59 AM	PHl3 MFC set to  0.000000
1/11/2011	3:30:59 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:30:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:30:59 AM	Tube furnace set to 0
1/11/2011	3:31:59 AM	Helium valve closed
1/11/2011	3:31:59 AM	H2 valve closed
1/11/2011	3:31:59 AM	BCl3 valve closed
1/11/2011	3:31:59 AM	PH3 valve closed
1/11/2011	3:31:59 AM	SiCl4 pre valve closed
1/11/2011	3:31:59 AM	SiCl4 post valve closed
1/11/2011	3:31:59 AM	Bubbler valve closed
1/11/2011	3:31:59 AM	Main Vac valve opened
1/11/2011	3:31:59 AM	Bypass valve opened
1/11/2011	3:31:59 AM	Helium MFC set to  0.000000
1/11/2011	3:31:59 AM	H2 MFC set to  0.000000
1/11/2011	3:31:59 AM	BCl3 MFC set to  0.000000
1/11/2011	3:31:59 AM	PHl3 MFC set to  0.000000
1/11/2011	3:31:59 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:31:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:31:59 AM	Tube furnace set to 0
1/11/2011	3:32:59 AM	H2 valve closed
1/11/2011	3:32:59 AM	BCl3 valve closed
1/11/2011	3:32:59 AM	PH3 valve closed
1/11/2011	3:32:59 AM	SiCl4 pre valve closed
1/11/2011	3:32:59 AM	SiCl4 post valve closed
1/11/2011	3:32:59 AM	Bubbler valve closed
1/11/2011	3:32:59 AM	Helium valve opened
1/11/2011	3:32:59 AM	Main Vac valve opened
1/11/2011	3:32:59 AM	Bypass valve opened
1/11/2011	3:32:59 AM	Helium MFC set to  100.000000
1/11/2011	3:32:59 AM	H2 MFC set to  0.000000
1/11/2011	3:32:59 AM	BCl3 MFC set to  0.000000
1/11/2011	3:32:59 AM	PHl3 MFC set to  0.000000
1/11/2011	3:32:59 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:32:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:32:59 AM	Tube furnace set to 0
1/11/2011	3:33:59 AM	Helium valve closed
1/11/2011	3:33:59 AM	H2 valve closed
1/11/2011	3:33:59 AM	BCl3 valve closed
1/11/2011	3:33:59 AM	PH3 valve closed
1/11/2011	3:33:59 AM	SiCl4 pre valve closed
1/11/2011	3:33:59 AM	SiCl4 post valve closed
1/11/2011	3:33:59 AM	Bubbler valve closed
1/11/2011	3:33:59 AM	Main Vac valve opened
1/11/2011	3:33:59 AM	Bypass valve opened
1/11/2011	3:33:59 AM	Helium MFC set to  0.000000
1/11/2011	3:33:59 AM	H2 MFC set to  0.000000
1/11/2011	3:33:59 AM	BCl3 MFC set to  0.000000
1/11/2011	3:33:59 AM	PHl3 MFC set to  0.000000
1/11/2011	3:33:59 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:33:59 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:33:59 AM	Tube furnace set to 0
1/11/2011	3:35:00 AM	H2 valve closed
1/11/2011	3:35:00 AM	BCl3 valve closed
1/11/2011	3:35:00 AM	PH3 valve closed
1/11/2011	3:35:00 AM	SiCl4 pre valve closed
1/11/2011	3:35:00 AM	SiCl4 post valve closed
1/11/2011	3:35:00 AM	Bubbler valve closed
1/11/2011	3:35:00 AM	Helium valve opened
1/11/2011	3:35:00 AM	Main Vac valve opened
1/11/2011	3:35:00 AM	Bypass valve opened
1/11/2011	3:35:00 AM	Helium MFC set to  100.000000
1/11/2011	3:35:00 AM	H2 MFC set to  0.000000
1/11/2011	3:35:00 AM	BCl3 MFC set to  0.000000
1/11/2011	3:35:00 AM	PHl3 MFC set to  0.000000
1/11/2011	3:35:00 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:35:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:35:00 AM	Tube furnace set to 0
1/11/2011	3:36:00 AM	Helium valve closed
1/11/2011	3:36:00 AM	H2 valve closed
1/11/2011	3:36:00 AM	BCl3 valve closed
1/11/2011	3:36:00 AM	PH3 valve closed
1/11/2011	3:36:00 AM	SiCl4 pre valve closed
1/11/2011	3:36:00 AM	SiCl4 post valve closed
1/11/2011	3:36:00 AM	Bubbler valve closed
1/11/2011	3:36:00 AM	Main Vac valve opened
1/11/2011	3:36:00 AM	Bypass valve opened
1/11/2011	3:36:00 AM	Helium MFC set to  0.000000
1/11/2011	3:36:00 AM	H2 MFC set to  0.000000
1/11/2011	3:36:00 AM	BCl3 MFC set to  0.000000
1/11/2011	3:36:00 AM	PHl3 MFC set to  0.000000
1/11/2011	3:36:00 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:36:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:36:00 AM	Tube furnace set to 0
1/11/2011	3:37:00 AM	H2 valve closed
1/11/2011	3:37:00 AM	BCl3 valve closed
1/11/2011	3:37:00 AM	PH3 valve closed
1/11/2011	3:37:00 AM	SiCl4 pre valve closed
1/11/2011	3:37:00 AM	SiCl4 post valve closed
1/11/2011	3:37:00 AM	Bubbler valve closed
1/11/2011	3:37:00 AM	Helium valve opened
1/11/2011	3:37:00 AM	Main Vac valve opened
1/11/2011	3:37:00 AM	Bypass valve opened
1/11/2011	3:37:00 AM	Helium MFC set to  100.000000
1/11/2011	3:37:00 AM	H2 MFC set to  0.000000
1/11/2011	3:37:00 AM	BCl3 MFC set to  0.000000
1/11/2011	3:37:00 AM	PHl3 MFC set to  0.000000
1/11/2011	3:37:00 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:37:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:37:00 AM	Tube furnace set to 0
1/11/2011	3:38:00 AM	Helium valve closed
1/11/2011	3:38:00 AM	H2 valve closed
1/11/2011	3:38:00 AM	BCl3 valve closed
1/11/2011	3:38:00 AM	PH3 valve closed
1/11/2011	3:38:00 AM	SiCl4 pre valve closed
1/11/2011	3:38:00 AM	SiCl4 post valve closed
1/11/2011	3:38:00 AM	Bubbler valve closed
1/11/2011	3:38:00 AM	Main Vac valve opened
1/11/2011	3:38:00 AM	Bypass valve opened
1/11/2011	3:38:00 AM	Helium MFC set to  0.000000
1/11/2011	3:38:00 AM	H2 MFC set to  0.000000
1/11/2011	3:38:00 AM	BCl3 MFC set to  0.000000
1/11/2011	3:38:00 AM	PHl3 MFC set to  0.000000
1/11/2011	3:38:00 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:38:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:38:00 AM	Tube furnace set to 0
1/11/2011	3:39:00 AM	H2 valve closed
1/11/2011	3:39:00 AM	BCl3 valve closed
1/11/2011	3:39:00 AM	PH3 valve closed
1/11/2011	3:39:00 AM	SiCl4 pre valve closed
1/11/2011	3:39:00 AM	SiCl4 post valve closed
1/11/2011	3:39:00 AM	Bubbler valve closed
1/11/2011	3:39:00 AM	Helium valve opened
1/11/2011	3:39:00 AM	Main Vac valve opened
1/11/2011	3:39:00 AM	Bypass valve opened
1/11/2011	3:39:00 AM	Helium MFC set to  100.000000
1/11/2011	3:39:00 AM	H2 MFC set to  0.000000
1/11/2011	3:39:00 AM	BCl3 MFC set to  0.000000
1/11/2011	3:39:00 AM	PHl3 MFC set to  0.000000
1/11/2011	3:39:00 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:39:00 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:39:00 AM	Tube furnace set to 0
1/11/2011	3:40:01 AM	Helium valve closed
1/11/2011	3:40:01 AM	H2 valve closed
1/11/2011	3:40:01 AM	BCl3 valve closed
1/11/2011	3:40:01 AM	PH3 valve closed
1/11/2011	3:40:01 AM	SiCl4 pre valve closed
1/11/2011	3:40:01 AM	SiCl4 post valve closed
1/11/2011	3:40:01 AM	Bubbler valve closed
1/11/2011	3:40:01 AM	Main Vac valve opened
1/11/2011	3:40:01 AM	Bypass valve opened
1/11/2011	3:40:01 AM	Helium MFC set to  0.000000
1/11/2011	3:40:01 AM	H2 MFC set to  0.000000
1/11/2011	3:40:01 AM	BCl3 MFC set to  0.000000
1/11/2011	3:40:01 AM	PHl3 MFC set to  0.000000
1/11/2011	3:40:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:40:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:40:01 AM	Tube furnace set to 0
1/11/2011	3:41:01 AM	H2 valve closed
1/11/2011	3:41:01 AM	BCl3 valve closed
1/11/2011	3:41:01 AM	PH3 valve closed
1/11/2011	3:41:01 AM	SiCl4 pre valve closed
1/11/2011	3:41:01 AM	SiCl4 post valve closed
1/11/2011	3:41:01 AM	Bubbler valve closed
1/11/2011	3:41:01 AM	Helium valve opened
1/11/2011	3:41:01 AM	Main Vac valve opened
1/11/2011	3:41:01 AM	Bypass valve opened
1/11/2011	3:41:01 AM	Helium MFC set to  100.000000
1/11/2011	3:41:01 AM	H2 MFC set to  0.000000
1/11/2011	3:41:01 AM	BCl3 MFC set to  0.000000
1/11/2011	3:41:01 AM	PHl3 MFC set to  0.000000
1/11/2011	3:41:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:41:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:41:01 AM	Tube furnace set to 0
1/11/2011	3:42:01 AM	Helium valve closed
1/11/2011	3:42:01 AM	H2 valve closed
1/11/2011	3:42:01 AM	BCl3 valve closed
1/11/2011	3:42:01 AM	PH3 valve closed
1/11/2011	3:42:01 AM	SiCl4 pre valve closed
1/11/2011	3:42:01 AM	SiCl4 post valve closed
1/11/2011	3:42:01 AM	Bubbler valve closed
1/11/2011	3:42:01 AM	Main Vac valve opened
1/11/2011	3:42:01 AM	Bypass valve opened
1/11/2011	3:42:01 AM	Helium MFC set to  0.000000
1/11/2011	3:42:01 AM	H2 MFC set to  0.000000
1/11/2011	3:42:01 AM	BCl3 MFC set to  0.000000
1/11/2011	3:42:01 AM	PHl3 MFC set to  0.000000
1/11/2011	3:42:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:42:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:42:01 AM	Tube furnace set to 0
1/11/2011	3:43:01 AM	H2 valve closed
1/11/2011	3:43:01 AM	BCl3 valve closed
1/11/2011	3:43:01 AM	PH3 valve closed
1/11/2011	3:43:01 AM	SiCl4 pre valve closed
1/11/2011	3:43:01 AM	SiCl4 post valve closed
1/11/2011	3:43:01 AM	Bubbler valve closed
1/11/2011	3:43:01 AM	Helium valve opened
1/11/2011	3:43:01 AM	Main Vac valve opened
1/11/2011	3:43:01 AM	Bypass valve opened
1/11/2011	3:43:01 AM	Helium MFC set to  100.000000
1/11/2011	3:43:01 AM	H2 MFC set to  0.000000
1/11/2011	3:43:01 AM	BCl3 MFC set to  0.000000
1/11/2011	3:43:01 AM	PHl3 MFC set to  0.000000
1/11/2011	3:43:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:43:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:43:01 AM	Tube furnace set to 0
1/11/2011	3:44:01 AM	Helium valve closed
1/11/2011	3:44:01 AM	H2 valve closed
1/11/2011	3:44:01 AM	BCl3 valve closed
1/11/2011	3:44:01 AM	PH3 valve closed
1/11/2011	3:44:01 AM	SiCl4 pre valve closed
1/11/2011	3:44:01 AM	SiCl4 post valve closed
1/11/2011	3:44:01 AM	Bubbler valve closed
1/11/2011	3:44:01 AM	Main Vac valve opened
1/11/2011	3:44:01 AM	Bypass valve opened
1/11/2011	3:44:01 AM	Helium MFC set to  0.000000
1/11/2011	3:44:01 AM	H2 MFC set to  0.000000
1/11/2011	3:44:01 AM	BCl3 MFC set to  0.000000
1/11/2011	3:44:01 AM	PHl3 MFC set to  0.000000
1/11/2011	3:44:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	3:44:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	3:44:02 AM	Tube furnace set to 0
1/11/2011	3:44:03 AM	Run finished at 3:44 AM
1/11/2011	3:44:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	4:00:40 AM	Tube furnace set to 120
1/11/2011	4:02:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	4:02:30 AM	Recipe started at 4:02 AM
1/11/2011	4:02:30 AM	Helium valve closed
1/11/2011	4:02:30 AM	H2 valve closed
1/11/2011	4:02:30 AM	BCl3 valve closed
1/11/2011	4:02:30 AM	PH3 valve closed
1/11/2011	4:02:30 AM	SiCl4 pre valve closed
1/11/2011	4:02:30 AM	SiCl4 post valve closed
1/11/2011	4:02:30 AM	Main Vac valve closed
1/11/2011	4:02:30 AM	Bypass valve closed
1/11/2011	4:02:30 AM	Bubbler valve closed
1/11/2011	4:02:30 AM	Helium MFC set to  0.000000
1/11/2011	4:02:30 AM	H2 MFC set to  0.000000
1/11/2011	4:02:30 AM	BCl3 MFC set to  0.000000
1/11/2011	4:02:30 AM	PHl3 MFC set to  0.000000
1/11/2011	4:02:30 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:02:30 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:02:30 AM	Tube furnace set to 0
1/11/2011	4:02:30 AM	Run finished at 4:02 AM
1/11/2011	4:02:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	4:02:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:02:51 AM	Recipe started at 4:02 AM
1/11/2011	4:02:51 AM	Helium valve closed
1/11/2011	4:02:51 AM	H2 valve closed
1/11/2011	4:02:51 AM	BCl3 valve closed
1/11/2011	4:02:51 AM	PH3 valve closed
1/11/2011	4:02:51 AM	SiCl4 pre valve closed
1/11/2011	4:02:51 AM	SiCl4 post valve closed
1/11/2011	4:02:51 AM	Main Vac valve closed
1/11/2011	4:02:51 AM	Bubbler valve closed
1/11/2011	4:02:51 AM	Bypass valve opened
1/11/2011	4:02:51 AM	Helium MFC set to  0.000000
1/11/2011	4:02:51 AM	H2 MFC set to  0.000000
1/11/2011	4:02:51 AM	BCl3 MFC set to  0.000000
1/11/2011	4:02:51 AM	PHl3 MFC set to  0.000000
1/11/2011	4:02:51 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:02:51 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:02:51 AM	Tube furnace set to 0
1/11/2011	4:02:51 AM	Helium valve closed
1/11/2011	4:02:51 AM	H2 valve closed
1/11/2011	4:02:51 AM	BCl3 valve closed
1/11/2011	4:02:51 AM	PH3 valve closed
1/11/2011	4:02:51 AM	SiCl4 pre valve closed
1/11/2011	4:02:51 AM	SiCl4 post valve closed
1/11/2011	4:02:51 AM	Bubbler valve closed
1/11/2011	4:02:51 AM	Main Vac valve opened
1/11/2011	4:02:51 AM	Bypass valve opened
1/11/2011	4:02:51 AM	Helium MFC set to  0.000000
1/11/2011	4:02:51 AM	H2 MFC set to  0.000000
1/11/2011	4:02:51 AM	BCl3 MFC set to  0.000000
1/11/2011	4:02:51 AM	PHl3 MFC set to  0.000000
1/11/2011	4:02:51 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:02:51 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:02:52 AM	Tube furnace set to 0
1/11/2011	4:02:52 AM	Run finished at 4:02 AM
1/11/2011	4:02:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:32:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	4:32:21 AM	Recipe started at 4:32 AM
1/11/2011	4:32:21 AM	Helium valve closed
1/11/2011	4:32:21 AM	H2 valve closed
1/11/2011	4:32:21 AM	BCl3 valve closed
1/11/2011	4:32:21 AM	PH3 valve closed
1/11/2011	4:32:21 AM	SiCl4 pre valve closed
1/11/2011	4:32:21 AM	SiCl4 post valve closed
1/11/2011	4:32:21 AM	Main Vac valve closed
1/11/2011	4:32:21 AM	Bypass valve closed
1/11/2011	4:32:21 AM	Bubbler valve closed
1/11/2011	4:32:21 AM	Helium MFC set to  0.000000
1/11/2011	4:32:21 AM	H2 MFC set to  0.000000
1/11/2011	4:32:21 AM	BCl3 MFC set to  0.000000
1/11/2011	4:32:21 AM	PHl3 MFC set to  0.000000
1/11/2011	4:32:21 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:32:21 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:32:21 AM	Tube furnace set to 0
1/11/2011	4:32:22 AM	Run finished at 4:32 AM
1/11/2011	4:32:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/11/2011	4:33:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:33:12 AM	Recipe started at 4:33 AM
1/11/2011	4:33:12 AM	Helium valve closed
1/11/2011	4:33:12 AM	H2 valve closed
1/11/2011	4:33:12 AM	BCl3 valve closed
1/11/2011	4:33:12 AM	PH3 valve closed
1/11/2011	4:33:12 AM	SiCl4 pre valve closed
1/11/2011	4:33:12 AM	SiCl4 post valve closed
1/11/2011	4:33:12 AM	Main Vac valve closed
1/11/2011	4:33:12 AM	Bubbler valve closed
1/11/2011	4:33:12 AM	Bypass valve opened
1/11/2011	4:33:12 AM	Helium MFC set to  0.000000
1/11/2011	4:33:12 AM	H2 MFC set to  0.000000
1/11/2011	4:33:12 AM	BCl3 MFC set to  0.000000
1/11/2011	4:33:12 AM	PHl3 MFC set to  0.000000
1/11/2011	4:33:12 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:33:12 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:33:12 AM	Tube furnace set to 0
1/11/2011	4:33:13 AM	Helium valve closed
1/11/2011	4:33:13 AM	H2 valve closed
1/11/2011	4:33:13 AM	BCl3 valve closed
1/11/2011	4:33:13 AM	PH3 valve closed
1/11/2011	4:33:13 AM	SiCl4 pre valve closed
1/11/2011	4:33:13 AM	SiCl4 post valve closed
1/11/2011	4:33:13 AM	Bubbler valve closed
1/11/2011	4:33:13 AM	Main Vac valve opened
1/11/2011	4:33:13 AM	Bypass valve opened
1/11/2011	4:33:13 AM	Helium MFC set to  0.000000
1/11/2011	4:33:13 AM	H2 MFC set to  0.000000
1/11/2011	4:33:13 AM	BCl3 MFC set to  0.000000
1/11/2011	4:33:13 AM	PHl3 MFC set to  0.000000
1/11/2011	4:33:13 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:33:13 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:33:13 AM	Tube furnace set to 0
1/11/2011	4:33:13 AM	Run finished at 4:33 AM
1/11/2011	4:33:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:33:19 AM	Tube furnace set to 150
1/11/2011	4:35:31 AM	Recipe started at 4:35 AM
1/11/2011	4:35:31 AM	Helium valve closed
1/11/2011	4:35:31 AM	BCl3 valve closed
1/11/2011	4:35:31 AM	PH3 valve closed
1/11/2011	4:35:31 AM	SiCl4 pre valve closed
1/11/2011	4:35:31 AM	SiCl4 post valve closed
1/11/2011	4:35:31 AM	Main Vac valve closed
1/11/2011	4:35:31 AM	Bypass valve closed
1/11/2011	4:35:31 AM	Bubbler valve closed
1/11/2011	4:35:31 AM	H2 valve opened
1/11/2011	4:35:31 AM	Helium MFC set to  0.000000
1/11/2011	4:35:31 AM	H2 MFC set to  500.000000
1/11/2011	4:35:31 AM	BCl3 MFC set to  0.000000
1/11/2011	4:35:31 AM	PHl3 MFC set to  0.000000
1/11/2011	4:35:31 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:35:31 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:35:31 AM	Tube furnace set to 0
1/11/2011	4:36:50 AM	Helium valve closed
1/11/2011	4:36:50 AM	BCl3 valve closed
1/11/2011	4:36:50 AM	PH3 valve closed
1/11/2011	4:36:50 AM	SiCl4 pre valve closed
1/11/2011	4:36:50 AM	SiCl4 post valve closed
1/11/2011	4:36:50 AM	Main Vac valve closed
1/11/2011	4:36:50 AM	Bypass valve closed
1/11/2011	4:36:50 AM	H2 valve opened
1/11/2011	4:36:50 AM	Bubbler valve opened
1/11/2011	4:36:50 AM	Helium MFC set to  0.000000
1/11/2011	4:36:50 AM	H2 MFC set to  500.000000
1/11/2011	4:36:50 AM	BCl3 MFC set to  0.000000
1/11/2011	4:36:50 AM	PHl3 MFC set to  0.000000
1/11/2011	4:36:50 AM	SiCl4 MFC set to  0.000000
1/11/2011	4:36:50 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:36:51 AM	Tube furnace set to 1000
1/11/2011	4:56:51 AM	Helium valve closed
1/11/2011	4:56:51 AM	PH3 valve closed
1/11/2011	4:56:51 AM	Main Vac valve closed
1/11/2011	4:56:51 AM	Bypass valve closed
1/11/2011	4:56:51 AM	H2 valve opened
1/11/2011	4:56:51 AM	BCl3 valve opened
1/11/2011	4:56:51 AM	SiCl4 pre valve opened
1/11/2011	4:56:51 AM	SiCl4 post valve opened
1/11/2011	4:56:51 AM	Bubbler valve opened
1/11/2011	4:56:51 AM	Helium MFC set to  0.000000
1/11/2011	4:56:51 AM	H2 MFC set to  500.000000
1/11/2011	4:56:51 AM	BCl3 MFC set to  1.800000
1/11/2011	4:56:51 AM	PHl3 MFC set to  0.000000
1/11/2011	4:56:51 AM	SiCl4 MFC set to  50.000000
1/11/2011	4:56:51 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:56:51 AM	Tube furnace set to 1000
1/11/2011	5:11:51 AM	H2 valve closed
1/11/2011	5:11:51 AM	BCl3 valve closed
1/11/2011	5:11:51 AM	PH3 valve closed
1/11/2011	5:11:51 AM	SiCl4 pre valve closed
1/11/2011	5:11:51 AM	SiCl4 post valve closed
1/11/2011	5:11:51 AM	Main Vac valve closed
1/11/2011	5:11:51 AM	Bypass valve closed
1/11/2011	5:11:51 AM	Helium valve opened
1/11/2011	5:11:51 AM	Bubbler valve opened
1/11/2011	5:11:51 AM	Helium MFC set to  500.000000
1/11/2011	5:11:51 AM	H2 MFC set to  0.000000
1/11/2011	5:11:51 AM	BCl3 MFC set to  0.000000
1/11/2011	5:11:51 AM	PHl3 MFC set to  0.000000
1/11/2011	5:11:51 AM	SiCl4 MFC set to  0.000000
1/11/2011	5:11:51 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:11:51 AM	Tube furnace set to 0
1/11/2011	5:31:51 AM	Helium valve closed
1/11/2011	5:31:51 AM	H2 valve closed
1/11/2011	5:31:51 AM	BCl3 valve closed
1/11/2011	5:31:51 AM	PH3 valve closed
1/11/2011	5:31:51 AM	SiCl4 pre valve closed
1/11/2011	5:31:51 AM	SiCl4 post valve closed
1/11/2011	5:31:51 AM	Main Vac valve closed
1/11/2011	5:31:51 AM	Bypass valve closed
1/11/2011	5:31:51 AM	Bubbler valve closed
1/11/2011	5:31:51 AM	Helium MFC set to  0.000000
1/11/2011	5:31:51 AM	H2 MFC set to  0.000000
1/11/2011	5:31:51 AM	BCl3 MFC set to  0.000000
1/11/2011	5:31:51 AM	PHl3 MFC set to  0.000000
1/11/2011	5:31:51 AM	SiCl4 MFC set to  0.000000
1/11/2011	5:31:51 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:31:51 AM	Tube furnace set to 0
1/11/2011	5:31:51 AM	Run finished at 5:31 AM
1/11/2011	5:54:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	5:54:55 AM	Recipe started at 5:54 AM
1/11/2011	5:54:55 AM	H2 valve closed
1/11/2011	5:54:55 AM	BCl3 valve closed
1/11/2011	5:54:55 AM	PH3 valve closed
1/11/2011	5:54:55 AM	SiCl4 pre valve closed
1/11/2011	5:54:55 AM	SiCl4 post valve closed
1/11/2011	5:54:55 AM	Main Vac valve closed
1/11/2011	5:54:55 AM	Bypass valve closed
1/11/2011	5:54:55 AM	Bubbler valve closed
1/11/2011	5:54:55 AM	Helium valve opened
1/11/2011	5:54:55 AM	Helium MFC set to  500.000000
1/11/2011	5:54:55 AM	H2 MFC set to  0.000000
1/11/2011	5:54:55 AM	BCl3 MFC set to  0.000000
1/11/2011	5:54:55 AM	PHl3 MFC set to  0.000000
1/11/2011	5:54:55 AM	SiCl4 MFC set to  0.000000
1/11/2011	5:54:55 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:54:55 AM	Tube furnace set to 0
1/11/2011	5:55:01 AM	Helium valve closed
1/11/2011	5:55:01 AM	H2 valve closed
1/11/2011	5:55:01 AM	BCl3 valve closed
1/11/2011	5:55:01 AM	PH3 valve closed
1/11/2011	5:55:01 AM	SiCl4 pre valve closed
1/11/2011	5:55:01 AM	SiCl4 post valve closed
1/11/2011	5:55:01 AM	Main Vac valve closed
1/11/2011	5:55:01 AM	Bypass valve closed
1/11/2011	5:55:01 AM	Bubbler valve closed
1/11/2011	5:55:01 AM	Helium MFC set to  0.000000
1/11/2011	5:55:01 AM	H2 MFC set to  0.000000
1/11/2011	5:55:01 AM	BCl3 MFC set to  0.000000
1/11/2011	5:55:01 AM	PHl3 MFC set to  0.000000
1/11/2011	5:55:01 AM	SiCl4 MFC set to  0.000000
1/11/2011	5:55:01 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:55:01 AM	Tube furnace set to 0
1/11/2011	5:55:02 AM	Run finished at 5:55 AM
1/11/2011	5:55:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	6:07:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	6:07:21 AM	Recipe started at 6:07 AM
1/11/2011	6:07:21 AM	Helium valve closed
1/11/2011	6:07:21 AM	H2 valve closed
1/11/2011	6:07:21 AM	BCl3 valve closed
1/11/2011	6:07:21 AM	PH3 valve closed
1/11/2011	6:07:21 AM	SiCl4 pre valve closed
1/11/2011	6:07:21 AM	SiCl4 post valve closed
1/11/2011	6:07:21 AM	Main Vac valve closed
1/11/2011	6:07:21 AM	Bubbler valve closed
1/11/2011	6:07:21 AM	Bypass valve opened
1/11/2011	6:07:21 AM	Helium MFC set to  0.000000
1/11/2011	6:07:21 AM	H2 MFC set to  0.000000
1/11/2011	6:07:21 AM	BCl3 MFC set to  0.000000
1/11/2011	6:07:21 AM	PHl3 MFC set to  0.000000
1/11/2011	6:07:21 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:07:21 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:07:21 AM	Tube furnace set to 0
1/11/2011	6:08:23 AM	Helium valve closed
1/11/2011	6:08:23 AM	H2 valve closed
1/11/2011	6:08:23 AM	BCl3 valve closed
1/11/2011	6:08:23 AM	PH3 valve closed
1/11/2011	6:08:23 AM	SiCl4 pre valve closed
1/11/2011	6:08:23 AM	SiCl4 post valve closed
1/11/2011	6:08:23 AM	Bubbler valve closed
1/11/2011	6:08:23 AM	Main Vac valve opened
1/11/2011	6:08:23 AM	Bypass valve opened
1/11/2011	6:08:23 AM	Helium MFC set to  0.000000
1/11/2011	6:08:23 AM	H2 MFC set to  0.000000
1/11/2011	6:08:23 AM	BCl3 MFC set to  0.000000
1/11/2011	6:08:23 AM	PHl3 MFC set to  0.000000
1/11/2011	6:08:23 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:08:23 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:08:23 AM	Tube furnace set to 0
1/11/2011	6:08:23 AM	Run finished at 6:08 AM
1/11/2011	6:08:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	6:09:04 AM	Tube furnace set to 200
1/11/2011	6:11:17 AM	Tube furnace set to 0
1/11/2011	6:11:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	6:11:44 AM	Recipe started at 6:11 AM
1/11/2011	6:11:44 AM	Helium valve closed
1/11/2011	6:11:44 AM	H2 valve closed
1/11/2011	6:11:44 AM	BCl3 valve closed
1/11/2011	6:11:44 AM	PH3 valve closed
1/11/2011	6:11:44 AM	SiCl4 pre valve closed
1/11/2011	6:11:44 AM	SiCl4 post valve closed
1/11/2011	6:11:44 AM	Main Vac valve closed
1/11/2011	6:11:44 AM	Bubbler valve closed
1/11/2011	6:11:44 AM	Bypass valve opened
1/11/2011	6:11:44 AM	Helium MFC set to  0.000000
1/11/2011	6:11:44 AM	H2 MFC set to  0.000000
1/11/2011	6:11:44 AM	BCl3 MFC set to  0.000000
1/11/2011	6:11:44 AM	PHl3 MFC set to  0.000000
1/11/2011	6:11:45 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:11:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:11:45 AM	Tube furnace set to 0
1/11/2011	6:11:45 AM	Helium valve closed
1/11/2011	6:11:45 AM	H2 valve closed
1/11/2011	6:11:45 AM	BCl3 valve closed
1/11/2011	6:11:45 AM	PH3 valve closed
1/11/2011	6:11:45 AM	SiCl4 pre valve closed
1/11/2011	6:11:45 AM	SiCl4 post valve closed
1/11/2011	6:11:45 AM	Bubbler valve closed
1/11/2011	6:11:45 AM	Main Vac valve opened
1/11/2011	6:11:45 AM	Bypass valve opened
1/11/2011	6:11:45 AM	Helium MFC set to  0.000000
1/11/2011	6:11:45 AM	H2 MFC set to  0.000000
1/11/2011	6:11:45 AM	BCl3 MFC set to  0.000000
1/11/2011	6:11:45 AM	PHl3 MFC set to  0.000000
1/11/2011	6:11:45 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:11:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:11:45 AM	Tube furnace set to 0
1/11/2011	6:12:45 AM	H2 valve closed
1/11/2011	6:12:45 AM	BCl3 valve closed
1/11/2011	6:12:45 AM	PH3 valve closed
1/11/2011	6:12:45 AM	SiCl4 pre valve closed
1/11/2011	6:12:45 AM	SiCl4 post valve closed
1/11/2011	6:12:45 AM	Bubbler valve closed
1/11/2011	6:12:45 AM	Helium valve opened
1/11/2011	6:12:45 AM	Main Vac valve opened
1/11/2011	6:12:45 AM	Bypass valve opened
1/11/2011	6:12:45 AM	Helium MFC set to  100.000000
1/11/2011	6:12:45 AM	H2 MFC set to  0.000000
1/11/2011	6:12:45 AM	BCl3 MFC set to  0.000000
1/11/2011	6:12:45 AM	PHl3 MFC set to  0.000000
1/11/2011	6:12:45 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:12:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:12:45 AM	Tube furnace set to 0
1/11/2011	6:13:45 AM	Helium valve closed
1/11/2011	6:13:45 AM	H2 valve closed
1/11/2011	6:13:45 AM	BCl3 valve closed
1/11/2011	6:13:45 AM	PH3 valve closed
1/11/2011	6:13:45 AM	SiCl4 pre valve closed
1/11/2011	6:13:45 AM	SiCl4 post valve closed
1/11/2011	6:13:45 AM	Bubbler valve closed
1/11/2011	6:13:45 AM	Main Vac valve opened
1/11/2011	6:13:45 AM	Bypass valve opened
1/11/2011	6:13:45 AM	Helium MFC set to  0.000000
1/11/2011	6:13:45 AM	H2 MFC set to  0.000000
1/11/2011	6:13:45 AM	BCl3 MFC set to  0.000000
1/11/2011	6:13:45 AM	PHl3 MFC set to  0.000000
1/11/2011	6:13:45 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:13:45 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:13:46 AM	Tube furnace set to 0
1/11/2011	6:14:46 AM	H2 valve closed
1/11/2011	6:14:46 AM	BCl3 valve closed
1/11/2011	6:14:46 AM	PH3 valve closed
1/11/2011	6:14:46 AM	SiCl4 pre valve closed
1/11/2011	6:14:46 AM	SiCl4 post valve closed
1/11/2011	6:14:46 AM	Bubbler valve closed
1/11/2011	6:14:46 AM	Helium valve opened
1/11/2011	6:14:46 AM	Main Vac valve opened
1/11/2011	6:14:46 AM	Bypass valve opened
1/11/2011	6:14:46 AM	Helium MFC set to  100.000000
1/11/2011	6:14:46 AM	H2 MFC set to  0.000000
1/11/2011	6:14:46 AM	BCl3 MFC set to  0.000000
1/11/2011	6:14:46 AM	PHl3 MFC set to  0.000000
1/11/2011	6:14:46 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:14:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:14:46 AM	Tube furnace set to 0
1/11/2011	6:15:46 AM	Helium valve closed
1/11/2011	6:15:46 AM	H2 valve closed
1/11/2011	6:15:46 AM	BCl3 valve closed
1/11/2011	6:15:46 AM	PH3 valve closed
1/11/2011	6:15:46 AM	SiCl4 pre valve closed
1/11/2011	6:15:46 AM	SiCl4 post valve closed
1/11/2011	6:15:46 AM	Bubbler valve closed
1/11/2011	6:15:46 AM	Main Vac valve opened
1/11/2011	6:15:46 AM	Bypass valve opened
1/11/2011	6:15:46 AM	Helium MFC set to  0.000000
1/11/2011	6:15:46 AM	H2 MFC set to  0.000000
1/11/2011	6:15:46 AM	BCl3 MFC set to  0.000000
1/11/2011	6:15:46 AM	PHl3 MFC set to  0.000000
1/11/2011	6:15:46 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:15:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:15:46 AM	Tube furnace set to 0
1/11/2011	6:16:46 AM	H2 valve closed
1/11/2011	6:16:46 AM	BCl3 valve closed
1/11/2011	6:16:46 AM	PH3 valve closed
1/11/2011	6:16:46 AM	SiCl4 pre valve closed
1/11/2011	6:16:46 AM	SiCl4 post valve closed
1/11/2011	6:16:46 AM	Bubbler valve closed
1/11/2011	6:16:46 AM	Helium valve opened
1/11/2011	6:16:46 AM	Main Vac valve opened
1/11/2011	6:16:46 AM	Bypass valve opened
1/11/2011	6:16:46 AM	Helium MFC set to  100.000000
1/11/2011	6:16:46 AM	H2 MFC set to  0.000000
1/11/2011	6:16:46 AM	BCl3 MFC set to  0.000000
1/11/2011	6:16:46 AM	PHl3 MFC set to  0.000000
1/11/2011	6:16:46 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:16:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:16:46 AM	Tube furnace set to 0
1/11/2011	6:17:46 AM	Helium valve closed
1/11/2011	6:17:46 AM	H2 valve closed
1/11/2011	6:17:46 AM	BCl3 valve closed
1/11/2011	6:17:46 AM	PH3 valve closed
1/11/2011	6:17:46 AM	SiCl4 pre valve closed
1/11/2011	6:17:46 AM	SiCl4 post valve closed
1/11/2011	6:17:46 AM	Bubbler valve closed
1/11/2011	6:17:46 AM	Main Vac valve opened
1/11/2011	6:17:46 AM	Bypass valve opened
1/11/2011	6:17:46 AM	Helium MFC set to  0.000000
1/11/2011	6:17:46 AM	H2 MFC set to  0.000000
1/11/2011	6:17:46 AM	BCl3 MFC set to  0.000000
1/11/2011	6:17:46 AM	PHl3 MFC set to  0.000000
1/11/2011	6:17:46 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:17:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:17:46 AM	Tube furnace set to 0
1/11/2011	6:18:46 AM	H2 valve closed
1/11/2011	6:18:46 AM	BCl3 valve closed
1/11/2011	6:18:46 AM	PH3 valve closed
1/11/2011	6:18:46 AM	SiCl4 pre valve closed
1/11/2011	6:18:46 AM	SiCl4 post valve closed
1/11/2011	6:18:46 AM	Bubbler valve closed
1/11/2011	6:18:46 AM	Helium valve opened
1/11/2011	6:18:46 AM	Main Vac valve opened
1/11/2011	6:18:46 AM	Bypass valve opened
1/11/2011	6:18:46 AM	Helium MFC set to  100.000000
1/11/2011	6:18:46 AM	H2 MFC set to  0.000000
1/11/2011	6:18:46 AM	BCl3 MFC set to  0.000000
1/11/2011	6:18:46 AM	PHl3 MFC set to  0.000000
1/11/2011	6:18:46 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:18:46 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:18:47 AM	Tube furnace set to 0
1/11/2011	6:19:47 AM	Helium valve closed
1/11/2011	6:19:47 AM	H2 valve closed
1/11/2011	6:19:47 AM	BCl3 valve closed
1/11/2011	6:19:47 AM	PH3 valve closed
1/11/2011	6:19:47 AM	SiCl4 pre valve closed
1/11/2011	6:19:47 AM	SiCl4 post valve closed
1/11/2011	6:19:47 AM	Bubbler valve closed
1/11/2011	6:19:47 AM	Main Vac valve opened
1/11/2011	6:19:47 AM	Bypass valve opened
1/11/2011	6:19:47 AM	Helium MFC set to  0.000000
1/11/2011	6:19:47 AM	H2 MFC set to  0.000000
1/11/2011	6:19:47 AM	BCl3 MFC set to  0.000000
1/11/2011	6:19:47 AM	PHl3 MFC set to  0.000000
1/11/2011	6:19:47 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:19:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:19:47 AM	Tube furnace set to 0
1/11/2011	6:20:47 AM	H2 valve closed
1/11/2011	6:20:47 AM	BCl3 valve closed
1/11/2011	6:20:47 AM	PH3 valve closed
1/11/2011	6:20:47 AM	SiCl4 pre valve closed
1/11/2011	6:20:47 AM	SiCl4 post valve closed
1/11/2011	6:20:47 AM	Bubbler valve closed
1/11/2011	6:20:47 AM	Helium valve opened
1/11/2011	6:20:47 AM	Main Vac valve opened
1/11/2011	6:20:47 AM	Bypass valve opened
1/11/2011	6:20:47 AM	Helium MFC set to  100.000000
1/11/2011	6:20:47 AM	H2 MFC set to  0.000000
1/11/2011	6:20:47 AM	BCl3 MFC set to  0.000000
1/11/2011	6:20:47 AM	PHl3 MFC set to  0.000000
1/11/2011	6:20:47 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:20:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:20:47 AM	Tube furnace set to 0
1/11/2011	6:21:47 AM	Helium valve closed
1/11/2011	6:21:47 AM	H2 valve closed
1/11/2011	6:21:47 AM	BCl3 valve closed
1/11/2011	6:21:47 AM	PH3 valve closed
1/11/2011	6:21:47 AM	SiCl4 pre valve closed
1/11/2011	6:21:47 AM	SiCl4 post valve closed
1/11/2011	6:21:47 AM	Bubbler valve closed
1/11/2011	6:21:47 AM	Main Vac valve opened
1/11/2011	6:21:47 AM	Bypass valve opened
1/11/2011	6:21:47 AM	Helium MFC set to  0.000000
1/11/2011	6:21:47 AM	H2 MFC set to  0.000000
1/11/2011	6:21:47 AM	BCl3 MFC set to  0.000000
1/11/2011	6:21:47 AM	PHl3 MFC set to  0.000000
1/11/2011	6:21:47 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:21:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:21:47 AM	Tube furnace set to 0
1/11/2011	6:22:47 AM	H2 valve closed
1/11/2011	6:22:47 AM	BCl3 valve closed
1/11/2011	6:22:47 AM	PH3 valve closed
1/11/2011	6:22:47 AM	SiCl4 pre valve closed
1/11/2011	6:22:47 AM	SiCl4 post valve closed
1/11/2011	6:22:47 AM	Bubbler valve closed
1/11/2011	6:22:47 AM	Helium valve opened
1/11/2011	6:22:47 AM	Main Vac valve opened
1/11/2011	6:22:47 AM	Bypass valve opened
1/11/2011	6:22:47 AM	Helium MFC set to  100.000000
1/11/2011	6:22:47 AM	H2 MFC set to  0.000000
1/11/2011	6:22:47 AM	BCl3 MFC set to  0.000000
1/11/2011	6:22:47 AM	PHl3 MFC set to  0.000000
1/11/2011	6:22:47 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:22:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:22:47 AM	Tube furnace set to 0
1/11/2011	6:23:47 AM	Helium valve closed
1/11/2011	6:23:47 AM	H2 valve closed
1/11/2011	6:23:47 AM	BCl3 valve closed
1/11/2011	6:23:47 AM	PH3 valve closed
1/11/2011	6:23:47 AM	SiCl4 pre valve closed
1/11/2011	6:23:47 AM	SiCl4 post valve closed
1/11/2011	6:23:47 AM	Bubbler valve closed
1/11/2011	6:23:47 AM	Main Vac valve opened
1/11/2011	6:23:47 AM	Bypass valve opened
1/11/2011	6:23:47 AM	Helium MFC set to  0.000000
1/11/2011	6:23:47 AM	H2 MFC set to  0.000000
1/11/2011	6:23:47 AM	BCl3 MFC set to  0.000000
1/11/2011	6:23:47 AM	PHl3 MFC set to  0.000000
1/11/2011	6:23:47 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:23:47 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:23:48 AM	Tube furnace set to 0
1/11/2011	6:24:48 AM	H2 valve closed
1/11/2011	6:24:48 AM	BCl3 valve closed
1/11/2011	6:24:48 AM	PH3 valve closed
1/11/2011	6:24:48 AM	SiCl4 pre valve closed
1/11/2011	6:24:48 AM	SiCl4 post valve closed
1/11/2011	6:24:48 AM	Bubbler valve closed
1/11/2011	6:24:48 AM	Helium valve opened
1/11/2011	6:24:48 AM	Main Vac valve opened
1/11/2011	6:24:48 AM	Bypass valve opened
1/11/2011	6:24:48 AM	Helium MFC set to  100.000000
1/11/2011	6:24:48 AM	H2 MFC set to  0.000000
1/11/2011	6:24:48 AM	BCl3 MFC set to  0.000000
1/11/2011	6:24:48 AM	PHl3 MFC set to  0.000000
1/11/2011	6:24:48 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:24:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:24:48 AM	Tube furnace set to 0
1/11/2011	6:25:48 AM	Helium valve closed
1/11/2011	6:25:48 AM	H2 valve closed
1/11/2011	6:25:48 AM	BCl3 valve closed
1/11/2011	6:25:48 AM	PH3 valve closed
1/11/2011	6:25:48 AM	SiCl4 pre valve closed
1/11/2011	6:25:48 AM	SiCl4 post valve closed
1/11/2011	6:25:48 AM	Bubbler valve closed
1/11/2011	6:25:48 AM	Main Vac valve opened
1/11/2011	6:25:48 AM	Bypass valve opened
1/11/2011	6:25:48 AM	Helium MFC set to  0.000000
1/11/2011	6:25:48 AM	H2 MFC set to  0.000000
1/11/2011	6:25:48 AM	BCl3 MFC set to  0.000000
1/11/2011	6:25:48 AM	PHl3 MFC set to  0.000000
1/11/2011	6:25:48 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:25:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:25:48 AM	Tube furnace set to 0
1/11/2011	6:26:48 AM	H2 valve closed
1/11/2011	6:26:48 AM	BCl3 valve closed
1/11/2011	6:26:48 AM	PH3 valve closed
1/11/2011	6:26:48 AM	SiCl4 pre valve closed
1/11/2011	6:26:48 AM	SiCl4 post valve closed
1/11/2011	6:26:48 AM	Bubbler valve closed
1/11/2011	6:26:48 AM	Helium valve opened
1/11/2011	6:26:48 AM	Main Vac valve opened
1/11/2011	6:26:48 AM	Bypass valve opened
1/11/2011	6:26:48 AM	Helium MFC set to  100.000000
1/11/2011	6:26:48 AM	H2 MFC set to  0.000000
1/11/2011	6:26:48 AM	BCl3 MFC set to  0.000000
1/11/2011	6:26:48 AM	PHl3 MFC set to  0.000000
1/11/2011	6:26:48 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:26:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:26:48 AM	Tube furnace set to 0
1/11/2011	6:27:48 AM	Helium valve closed
1/11/2011	6:27:48 AM	H2 valve closed
1/11/2011	6:27:48 AM	BCl3 valve closed
1/11/2011	6:27:48 AM	PH3 valve closed
1/11/2011	6:27:48 AM	SiCl4 pre valve closed
1/11/2011	6:27:48 AM	SiCl4 post valve closed
1/11/2011	6:27:48 AM	Bubbler valve closed
1/11/2011	6:27:48 AM	Main Vac valve opened
1/11/2011	6:27:48 AM	Bypass valve opened
1/11/2011	6:27:48 AM	Helium MFC set to  0.000000
1/11/2011	6:27:48 AM	H2 MFC set to  0.000000
1/11/2011	6:27:48 AM	BCl3 MFC set to  0.000000
1/11/2011	6:27:48 AM	PHl3 MFC set to  0.000000
1/11/2011	6:27:48 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:27:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:27:48 AM	Tube furnace set to 0
1/11/2011	6:28:48 AM	H2 valve closed
1/11/2011	6:28:48 AM	BCl3 valve closed
1/11/2011	6:28:48 AM	PH3 valve closed
1/11/2011	6:28:48 AM	SiCl4 pre valve closed
1/11/2011	6:28:48 AM	SiCl4 post valve closed
1/11/2011	6:28:48 AM	Bubbler valve closed
1/11/2011	6:28:48 AM	Helium valve opened
1/11/2011	6:28:48 AM	Main Vac valve opened
1/11/2011	6:28:48 AM	Bypass valve opened
1/11/2011	6:28:48 AM	Helium MFC set to  100.000000
1/11/2011	6:28:48 AM	H2 MFC set to  0.000000
1/11/2011	6:28:48 AM	BCl3 MFC set to  0.000000
1/11/2011	6:28:48 AM	PHl3 MFC set to  0.000000
1/11/2011	6:28:48 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:28:48 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:28:49 AM	Tube furnace set to 0
1/11/2011	6:29:49 AM	Helium valve closed
1/11/2011	6:29:49 AM	H2 valve closed
1/11/2011	6:29:49 AM	BCl3 valve closed
1/11/2011	6:29:49 AM	PH3 valve closed
1/11/2011	6:29:49 AM	SiCl4 pre valve closed
1/11/2011	6:29:49 AM	SiCl4 post valve closed
1/11/2011	6:29:49 AM	Bubbler valve closed
1/11/2011	6:29:49 AM	Main Vac valve opened
1/11/2011	6:29:49 AM	Bypass valve opened
1/11/2011	6:29:49 AM	Helium MFC set to  0.000000
1/11/2011	6:29:49 AM	H2 MFC set to  0.000000
1/11/2011	6:29:49 AM	BCl3 MFC set to  0.000000
1/11/2011	6:29:49 AM	PHl3 MFC set to  0.000000
1/11/2011	6:29:49 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:29:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:29:49 AM	Tube furnace set to 0
1/11/2011	6:30:49 AM	H2 valve closed
1/11/2011	6:30:49 AM	BCl3 valve closed
1/11/2011	6:30:49 AM	PH3 valve closed
1/11/2011	6:30:49 AM	SiCl4 pre valve closed
1/11/2011	6:30:49 AM	SiCl4 post valve closed
1/11/2011	6:30:49 AM	Bubbler valve closed
1/11/2011	6:30:49 AM	Helium valve opened
1/11/2011	6:30:49 AM	Main Vac valve opened
1/11/2011	6:30:49 AM	Bypass valve opened
1/11/2011	6:30:49 AM	Helium MFC set to  100.000000
1/11/2011	6:30:49 AM	H2 MFC set to  0.000000
1/11/2011	6:30:49 AM	BCl3 MFC set to  0.000000
1/11/2011	6:30:49 AM	PHl3 MFC set to  0.000000
1/11/2011	6:30:49 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:30:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:30:49 AM	Tube furnace set to 0
1/11/2011	6:31:49 AM	Helium valve closed
1/11/2011	6:31:49 AM	H2 valve closed
1/11/2011	6:31:49 AM	BCl3 valve closed
1/11/2011	6:31:49 AM	PH3 valve closed
1/11/2011	6:31:49 AM	SiCl4 pre valve closed
1/11/2011	6:31:49 AM	SiCl4 post valve closed
1/11/2011	6:31:49 AM	Bubbler valve closed
1/11/2011	6:31:49 AM	Main Vac valve opened
1/11/2011	6:31:49 AM	Bypass valve opened
1/11/2011	6:31:49 AM	Helium MFC set to  0.000000
1/11/2011	6:31:49 AM	H2 MFC set to  0.000000
1/11/2011	6:31:49 AM	BCl3 MFC set to  0.000000
1/11/2011	6:31:49 AM	PHl3 MFC set to  0.000000
1/11/2011	6:31:49 AM	SiCl4 MFC set to  0.000000
1/11/2011	6:31:49 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:31:49 AM	Tube furnace set to 0
1/11/2011	6:31:50 AM	Run finished at 6:31 AM
1/11/2011	6:31:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	7:24:13 AM	Recipe started at 7:24 AM
1/11/2011	7:24:13 AM	Helium valve closed
1/11/2011	7:24:13 AM	BCl3 valve closed
1/11/2011	7:24:13 AM	PH3 valve closed
1/11/2011	7:24:13 AM	SiCl4 pre valve closed
1/11/2011	7:24:13 AM	SiCl4 post valve closed
1/11/2011	7:24:13 AM	Main Vac valve closed
1/11/2011	7:24:13 AM	Bypass valve closed
1/11/2011	7:24:13 AM	Bubbler valve closed
1/11/2011	7:24:13 AM	H2 valve opened
1/11/2011	7:24:13 AM	Helium MFC set to  0.000000
1/11/2011	7:24:13 AM	H2 MFC set to  500.000000
1/11/2011	7:24:13 AM	BCl3 MFC set to  0.000000
1/11/2011	7:24:13 AM	PHl3 MFC set to  0.000000
1/11/2011	7:24:13 AM	SiCl4 MFC set to  0.000000
1/11/2011	7:24:13 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	7:24:13 AM	Tube furnace set to 0
1/11/2011	7:25:33 AM	Helium valve closed
1/11/2011	7:25:33 AM	BCl3 valve closed
1/11/2011	7:25:33 AM	PH3 valve closed
1/11/2011	7:25:33 AM	SiCl4 pre valve closed
1/11/2011	7:25:33 AM	SiCl4 post valve closed
1/11/2011	7:25:33 AM	Main Vac valve closed
1/11/2011	7:25:33 AM	Bypass valve closed
1/11/2011	7:25:33 AM	H2 valve opened
1/11/2011	7:25:33 AM	Bubbler valve opened
1/11/2011	7:25:33 AM	Helium MFC set to  0.000000
1/11/2011	7:25:33 AM	H2 MFC set to  500.000000
1/11/2011	7:25:33 AM	BCl3 MFC set to  0.000000
1/11/2011	7:25:33 AM	PHl3 MFC set to  0.000000
1/11/2011	7:25:33 AM	SiCl4 MFC set to  0.000000
1/11/2011	7:25:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	7:25:33 AM	Tube furnace set to 1000
1/11/2011	7:45:33 AM	Helium valve closed
1/11/2011	7:45:33 AM	PH3 valve closed
1/11/2011	7:45:33 AM	Main Vac valve closed
1/11/2011	7:45:33 AM	Bypass valve closed
1/11/2011	7:45:33 AM	H2 valve opened
1/11/2011	7:45:33 AM	BCl3 valve opened
1/11/2011	7:45:33 AM	SiCl4 pre valve opened
1/11/2011	7:45:33 AM	SiCl4 post valve opened
1/11/2011	7:45:33 AM	Bubbler valve opened
1/11/2011	7:45:33 AM	Helium MFC set to  0.000000
1/11/2011	7:45:33 AM	H2 MFC set to  500.000000
1/11/2011	7:45:33 AM	BCl3 MFC set to  1.600000
1/11/2011	7:45:33 AM	PHl3 MFC set to  0.000000
1/11/2011	7:45:33 AM	SiCl4 MFC set to  50.000000
1/11/2011	7:45:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	7:45:33 AM	Tube furnace set to 1000
1/11/2011	8:03:03 AM	Helium valve closed
1/11/2011	8:03:03 AM	PH3 valve closed
1/11/2011	8:03:03 AM	Main Vac valve closed
1/11/2011	8:03:03 AM	Bypass valve closed
1/11/2011	8:03:03 AM	H2 valve opened
1/11/2011	8:03:03 AM	BCl3 valve opened
1/11/2011	8:03:03 AM	SiCl4 pre valve opened
1/11/2011	8:03:03 AM	SiCl4 post valve opened
1/11/2011	8:03:03 AM	Bubbler valve opened
1/11/2011	8:03:03 AM	Helium MFC set to  0.000000
1/11/2011	8:03:04 AM	H2 MFC set to  500.000000
1/11/2011	8:03:04 AM	BCl3 MFC set to  2.500000
1/11/2011	8:03:04 AM	PHl3 MFC set to  0.000000
1/11/2011	8:03:04 AM	SiCl4 MFC set to  50.000000
1/11/2011	8:03:04 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:03:04 AM	Tube furnace set to 1000
1/11/2011	8:03:34 AM	H2 valve closed
1/11/2011	8:03:34 AM	BCl3 valve closed
1/11/2011	8:03:34 AM	PH3 valve closed
1/11/2011	8:03:34 AM	SiCl4 pre valve closed
1/11/2011	8:03:34 AM	SiCl4 post valve closed
1/11/2011	8:03:34 AM	Main Vac valve closed
1/11/2011	8:03:34 AM	Bypass valve closed
1/11/2011	8:03:34 AM	Helium valve opened
1/11/2011	8:03:34 AM	Bubbler valve opened
1/11/2011	8:03:34 AM	Helium MFC set to  500.000000
1/11/2011	8:03:34 AM	H2 MFC set to  0.000000
1/11/2011	8:03:34 AM	BCl3 MFC set to  0.000000
1/11/2011	8:03:34 AM	PHl3 MFC set to  0.000000
1/11/2011	8:03:34 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:03:34 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:03:34 AM	Tube furnace set to 0
1/11/2011	8:23:34 AM	Helium valve closed
1/11/2011	8:23:34 AM	H2 valve closed
1/11/2011	8:23:34 AM	BCl3 valve closed
1/11/2011	8:23:34 AM	PH3 valve closed
1/11/2011	8:23:34 AM	SiCl4 pre valve closed
1/11/2011	8:23:34 AM	SiCl4 post valve closed
1/11/2011	8:23:34 AM	Main Vac valve closed
1/11/2011	8:23:34 AM	Bypass valve closed
1/11/2011	8:23:34 AM	Bubbler valve closed
1/11/2011	8:23:34 AM	Helium MFC set to  0.000000
1/11/2011	8:23:34 AM	H2 MFC set to  0.000000
1/11/2011	8:23:34 AM	BCl3 MFC set to  0.000000
1/11/2011	8:23:34 AM	PHl3 MFC set to  0.000000
1/11/2011	8:23:34 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:23:34 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:23:34 AM	Tube furnace set to 0
1/11/2011	8:23:34 AM	Run finished at 8:23 AM
1/11/2011	8:40:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	8:40:27 AM	Recipe started at 8:40 AM
1/11/2011	8:40:27 AM	H2 valve closed
1/11/2011	8:40:27 AM	BCl3 valve closed
1/11/2011	8:40:27 AM	PH3 valve closed
1/11/2011	8:40:27 AM	SiCl4 pre valve closed
1/11/2011	8:40:27 AM	SiCl4 post valve closed
1/11/2011	8:40:27 AM	Main Vac valve closed
1/11/2011	8:40:27 AM	Bypass valve closed
1/11/2011	8:40:27 AM	Bubbler valve closed
1/11/2011	8:40:27 AM	Helium valve opened
1/11/2011	8:40:27 AM	Helium MFC set to  500.000000
1/11/2011	8:40:27 AM	H2 MFC set to  0.000000
1/11/2011	8:40:27 AM	BCl3 MFC set to  0.000000
1/11/2011	8:40:27 AM	PHl3 MFC set to  0.000000
1/11/2011	8:40:27 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:40:27 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:40:27 AM	Tube furnace set to 0
1/11/2011	8:40:33 AM	Helium valve closed
1/11/2011	8:40:33 AM	H2 valve closed
1/11/2011	8:40:33 AM	BCl3 valve closed
1/11/2011	8:40:33 AM	PH3 valve closed
1/11/2011	8:40:33 AM	SiCl4 pre valve closed
1/11/2011	8:40:33 AM	SiCl4 post valve closed
1/11/2011	8:40:33 AM	Main Vac valve closed
1/11/2011	8:40:33 AM	Bypass valve closed
1/11/2011	8:40:33 AM	Bubbler valve closed
1/11/2011	8:40:33 AM	Helium MFC set to  0.000000
1/11/2011	8:40:33 AM	H2 MFC set to  0.000000
1/11/2011	8:40:33 AM	BCl3 MFC set to  0.000000
1/11/2011	8:40:33 AM	PHl3 MFC set to  0.000000
1/11/2011	8:40:33 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:40:33 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:40:33 AM	Tube furnace set to 0
1/11/2011	8:40:33 AM	Run finished at 8:40 AM
1/11/2011	8:40:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	8:43:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	8:43:15 AM	Recipe started at 8:43 AM
1/11/2011	8:43:15 AM	Helium valve closed
1/11/2011	8:43:15 AM	H2 valve closed
1/11/2011	8:43:15 AM	BCl3 valve closed
1/11/2011	8:43:15 AM	PH3 valve closed
1/11/2011	8:43:15 AM	SiCl4 pre valve closed
1/11/2011	8:43:15 AM	SiCl4 post valve closed
1/11/2011	8:43:15 AM	Main Vac valve closed
1/11/2011	8:43:15 AM	Bubbler valve closed
1/11/2011	8:43:15 AM	Bypass valve opened
1/11/2011	8:43:15 AM	Helium MFC set to  0.000000
1/11/2011	8:43:15 AM	H2 MFC set to  0.000000
1/11/2011	8:43:15 AM	BCl3 MFC set to  0.000000
1/11/2011	8:43:15 AM	PHl3 MFC set to  0.000000
1/11/2011	8:43:15 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:43:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:43:15 AM	Tube furnace set to 0
1/11/2011	8:44:15 AM	Helium valve closed
1/11/2011	8:44:15 AM	H2 valve closed
1/11/2011	8:44:15 AM	BCl3 valve closed
1/11/2011	8:44:15 AM	PH3 valve closed
1/11/2011	8:44:15 AM	SiCl4 pre valve closed
1/11/2011	8:44:15 AM	SiCl4 post valve closed
1/11/2011	8:44:15 AM	Bubbler valve closed
1/11/2011	8:44:15 AM	Main Vac valve opened
1/11/2011	8:44:15 AM	Bypass valve opened
1/11/2011	8:44:15 AM	Helium MFC set to  0.000000
1/11/2011	8:44:15 AM	H2 MFC set to  0.000000
1/11/2011	8:44:15 AM	BCl3 MFC set to  0.000000
1/11/2011	8:44:15 AM	PHl3 MFC set to  0.000000
1/11/2011	8:44:15 AM	SiCl4 MFC set to  0.000000
1/11/2011	8:44:15 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:44:15 AM	Tube furnace set to 0
1/11/2011	8:44:15 AM	Run finished at 8:44 AM
1/11/2011	8:44:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	10:15:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	10:15:03 AM	Recipe started at 10:15 AM
1/11/2011	10:15:03 AM	H2 valve closed
1/11/2011	10:15:03 AM	BCl3 valve closed
1/11/2011	10:15:03 AM	PH3 valve closed
1/11/2011	10:15:03 AM	SiCl4 pre valve closed
1/11/2011	10:15:03 AM	SiCl4 post valve closed
1/11/2011	10:15:03 AM	Main Vac valve closed
1/11/2011	10:15:03 AM	Bypass valve closed
1/11/2011	10:15:03 AM	Bubbler valve closed
1/11/2011	10:15:03 AM	Helium valve opened
1/11/2011	10:15:03 AM	Helium MFC set to  500.000000
1/11/2011	10:15:03 AM	H2 MFC set to  0.000000
1/11/2011	10:15:03 AM	BCl3 MFC set to  0.000000
1/11/2011	10:15:03 AM	PHl3 MFC set to  0.000000
1/11/2011	10:15:03 AM	SiCl4 MFC set to  0.000000
1/11/2011	10:15:03 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	10:15:03 AM	Tube furnace set to 0
1/11/2011	10:16:20 AM	Helium valve closed
1/11/2011	10:16:20 AM	H2 valve closed
1/11/2011	10:16:20 AM	BCl3 valve closed
1/11/2011	10:16:20 AM	PH3 valve closed
1/11/2011	10:16:20 AM	SiCl4 pre valve closed
1/11/2011	10:16:20 AM	SiCl4 post valve closed
1/11/2011	10:16:20 AM	Main Vac valve closed
1/11/2011	10:16:20 AM	Bypass valve closed
1/11/2011	10:16:20 AM	Bubbler valve closed
1/11/2011	10:16:20 AM	Helium MFC set to  0.000000
1/11/2011	10:16:20 AM	H2 MFC set to  0.000000
1/11/2011	10:16:20 AM	BCl3 MFC set to  0.000000
1/11/2011	10:16:20 AM	PHl3 MFC set to  0.000000
1/11/2011	10:16:20 AM	SiCl4 MFC set to  0.000000
1/11/2011	10:16:20 AM	Bypass solenoid MFC set to  0.000000
1/11/2011	10:16:20 AM	Tube furnace set to 0
1/11/2011	10:16:21 AM	Run finished at 10:16 AM
1/11/2011	10:16:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	10:40:59 AM	Program exited cleanly
1/11/2011	4:18:11 PM	Program started normally
1/11/2011	4:18:11 PM	Helium valve closed
1/11/2011	4:18:11 PM	H2 valve closed
1/11/2011	4:18:11 PM	BCl3 valve closed
1/11/2011	4:18:11 PM	PH3 valve closed
1/11/2011	4:18:11 PM	SiCl4 pre valve closed
1/11/2011	4:18:11 PM	SiCl4 post valve closed
1/11/2011	4:18:11 PM	Main Vac valve closed
1/11/2011	4:18:11 PM	Bypass valve closed
1/11/2011	4:18:11 PM	Bubbler valve closed
1/11/2011	4:18:11 PM	Helium MFC set to  0.000000
1/11/2011	4:18:11 PM	H2 MFC set to  0.000000
1/11/2011	4:18:11 PM	BCl3 MFC set to  0.000000
1/11/2011	4:18:11 PM	PHl3 MFC set to  0.000000
1/11/2011	4:18:11 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:18:11 PM	Bypass solenoid MFC set to  760.000000
1/11/2011	4:18:11 PM	Tube furnace set to 0
1/11/2011	4:18:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:18:13 PM	Recipe started at 4:18 PM
1/11/2011	4:18:13 PM	Helium valve closed
1/11/2011	4:18:13 PM	H2 valve closed
1/11/2011	4:18:13 PM	BCl3 valve closed
1/11/2011	4:18:13 PM	PH3 valve closed
1/11/2011	4:18:13 PM	SiCl4 pre valve closed
1/11/2011	4:18:13 PM	SiCl4 post valve closed
1/11/2011	4:18:13 PM	Main Vac valve closed
1/11/2011	4:18:13 PM	Bubbler valve closed
1/11/2011	4:18:13 PM	Bypass valve opened
1/11/2011	4:18:13 PM	Helium MFC set to  0.000000
1/11/2011	4:18:13 PM	H2 MFC set to  0.000000
1/11/2011	4:18:13 PM	BCl3 MFC set to  0.000000
1/11/2011	4:18:13 PM	PHl3 MFC set to  0.000000
1/11/2011	4:18:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:18:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:18:13 PM	Tube furnace set to 0
1/11/2011	4:19:09 PM	Run aborted at 4:19 PM
1/11/2011	4:19:09 PM	Helium valve closed
1/11/2011	4:19:09 PM	H2 valve closed
1/11/2011	4:19:09 PM	BCl3 valve closed
1/11/2011	4:19:09 PM	PH3 valve closed
1/11/2011	4:19:09 PM	SiCl4 pre valve closed
1/11/2011	4:19:09 PM	SiCl4 post valve closed
1/11/2011	4:19:09 PM	Bypass valve closed
1/11/2011	4:19:09 PM	Main Vac valve closed
1/11/2011	4:19:09 PM	Bubbler valve closed
1/11/2011	4:19:09 PM	Helium MFC set to  0.000000
1/11/2011	4:19:09 PM	H2 MFC set to  0.000000
1/11/2011	4:19:09 PM	BCl3 MFC set to  0.000000
1/11/2011	4:19:09 PM	PHl3 MFC set to  0.000000
1/11/2011	4:19:09 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:19:09 PM	Tube furnace set to 0
1/11/2011	4:19:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:19:12 PM	Main Vac valve opened
1/11/2011	4:19:13 PM	Main Vac valve closed
1/11/2011	4:47:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	4:47:04 PM	Recipe started at 4:47 PM
1/11/2011	4:47:04 PM	H2 valve closed
1/11/2011	4:47:04 PM	BCl3 valve closed
1/11/2011	4:47:04 PM	PH3 valve closed
1/11/2011	4:47:04 PM	SiCl4 pre valve closed
1/11/2011	4:47:04 PM	SiCl4 post valve closed
1/11/2011	4:47:04 PM	Main Vac valve closed
1/11/2011	4:47:04 PM	Bypass valve closed
1/11/2011	4:47:04 PM	Bubbler valve closed
1/11/2011	4:47:04 PM	Helium valve opened
1/11/2011	4:47:04 PM	Helium MFC set to  500.000000
1/11/2011	4:47:04 PM	H2 MFC set to  0.000000
1/11/2011	4:47:04 PM	BCl3 MFC set to  0.000000
1/11/2011	4:47:04 PM	PHl3 MFC set to  0.000000
1/11/2011	4:47:04 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:47:04 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:47:04 PM	Tube furnace set to 0
1/11/2011	4:47:04 PM	Helium valve closed
1/11/2011	4:47:04 PM	H2 valve closed
1/11/2011	4:47:04 PM	BCl3 valve closed
1/11/2011	4:47:04 PM	PH3 valve closed
1/11/2011	4:47:04 PM	SiCl4 pre valve closed
1/11/2011	4:47:04 PM	SiCl4 post valve closed
1/11/2011	4:47:04 PM	Main Vac valve closed
1/11/2011	4:47:04 PM	Bypass valve closed
1/11/2011	4:47:04 PM	Bubbler valve closed
1/11/2011	4:47:04 PM	Helium MFC set to  0.000000
1/11/2011	4:47:04 PM	H2 MFC set to  0.000000
1/11/2011	4:47:04 PM	BCl3 MFC set to  0.000000
1/11/2011	4:47:04 PM	PHl3 MFC set to  0.000000
1/11/2011	4:47:04 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:47:04 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:47:04 PM	Tube furnace set to 0
1/11/2011	4:47:05 PM	Run finished at 4:47 PM
1/11/2011	4:47:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	4:47:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:47:10 PM	Recipe started at 4:47 PM
1/11/2011	4:47:10 PM	Helium valve closed
1/11/2011	4:47:10 PM	H2 valve closed
1/11/2011	4:47:10 PM	BCl3 valve closed
1/11/2011	4:47:10 PM	PH3 valve closed
1/11/2011	4:47:10 PM	SiCl4 pre valve closed
1/11/2011	4:47:10 PM	SiCl4 post valve closed
1/11/2011	4:47:10 PM	Main Vac valve closed
1/11/2011	4:47:10 PM	Bubbler valve closed
1/11/2011	4:47:10 PM	Bypass valve opened
1/11/2011	4:47:10 PM	Helium MFC set to  0.000000
1/11/2011	4:47:10 PM	H2 MFC set to  0.000000
1/11/2011	4:47:10 PM	BCl3 MFC set to  0.000000
1/11/2011	4:47:10 PM	PHl3 MFC set to  0.000000
1/11/2011	4:47:10 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:47:10 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:47:10 PM	Tube furnace set to 0
1/11/2011	4:47:50 PM	Helium valve closed
1/11/2011	4:47:50 PM	H2 valve closed
1/11/2011	4:47:50 PM	BCl3 valve closed
1/11/2011	4:47:50 PM	PH3 valve closed
1/11/2011	4:47:50 PM	SiCl4 pre valve closed
1/11/2011	4:47:50 PM	SiCl4 post valve closed
1/11/2011	4:47:50 PM	Bubbler valve closed
1/11/2011	4:47:50 PM	Main Vac valve opened
1/11/2011	4:47:50 PM	Bypass valve opened
1/11/2011	4:47:50 PM	Helium MFC set to  0.000000
1/11/2011	4:47:50 PM	H2 MFC set to  0.000000
1/11/2011	4:47:50 PM	BCl3 MFC set to  0.000000
1/11/2011	4:47:50 PM	PHl3 MFC set to  0.000000
1/11/2011	4:47:50 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:47:50 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:47:50 PM	Tube furnace set to 0
1/11/2011	4:47:51 PM	Run finished at 4:47 PM
1/11/2011	4:47:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	4:48:44 PM	Helium MFC set to  500.000000
1/11/2011	4:48:45 PM	Helium valve opened
1/11/2011	4:48:50 PM	Helium valve closed
1/11/2011	4:48:57 PM	Helium valve opened
1/11/2011	4:49:18 PM	Helium valve closed
1/11/2011	4:49:54 PM	Helium valve opened
1/11/2011	4:49:59 PM	Main Vac valve closed
1/11/2011	4:50:03 PM	Helium MFC set to  10.000000
1/11/2011	4:50:44 PM	Main Vac valve opened
1/11/2011	4:50:45 PM	Helium valve closed
1/11/2011	4:50:51 PM	Bypass valve closed
1/11/2011	4:50:57 PM	Bypass valve opened
1/11/2011	4:50:59 PM	Helium valve opened
1/11/2011	4:51:05 PM	Helium valve closed
1/11/2011	4:51:22 PM	Helium valve opened
1/11/2011	4:51:24 PM	Helium valve closed
1/11/2011	4:51:25 PM	Helium valve opened
1/11/2011	4:51:31 PM	Helium valve closed
1/11/2011	4:51:35 PM	Helium MFC set to  100.000000
1/11/2011	4:51:37 PM	Helium valve opened
1/11/2011	4:51:58 PM	Helium valve closed
1/11/2011	4:53:48 PM	Helium valve opened
1/11/2011	4:53:55 PM	Helium valve closed
1/11/2011	4:54:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	4:54:08 PM	Recipe started at 4:54 PM
1/11/2011	4:54:08 PM	H2 valve closed
1/11/2011	4:54:08 PM	BCl3 valve closed
1/11/2011	4:54:08 PM	PH3 valve closed
1/11/2011	4:54:08 PM	SiCl4 pre valve closed
1/11/2011	4:54:08 PM	SiCl4 post valve closed
1/11/2011	4:54:08 PM	Main Vac valve closed
1/11/2011	4:54:08 PM	Bypass valve closed
1/11/2011	4:54:08 PM	Bubbler valve closed
1/11/2011	4:54:08 PM	Helium valve opened
1/11/2011	4:54:08 PM	Helium MFC set to  500.000000
1/11/2011	4:54:08 PM	H2 MFC set to  0.000000
1/11/2011	4:54:08 PM	BCl3 MFC set to  0.000000
1/11/2011	4:54:08 PM	PHl3 MFC set to  0.000000
1/11/2011	4:54:08 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:54:08 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:54:08 PM	Tube furnace set to 0
1/11/2011	4:55:25 PM	Helium valve closed
1/11/2011	4:55:25 PM	H2 valve closed
1/11/2011	4:55:25 PM	BCl3 valve closed
1/11/2011	4:55:25 PM	PH3 valve closed
1/11/2011	4:55:25 PM	SiCl4 pre valve closed
1/11/2011	4:55:25 PM	SiCl4 post valve closed
1/11/2011	4:55:25 PM	Main Vac valve closed
1/11/2011	4:55:25 PM	Bypass valve closed
1/11/2011	4:55:25 PM	Bubbler valve closed
1/11/2011	4:55:25 PM	Helium MFC set to  0.000000
1/11/2011	4:55:25 PM	H2 MFC set to  0.000000
1/11/2011	4:55:25 PM	BCl3 MFC set to  0.000000
1/11/2011	4:55:25 PM	PHl3 MFC set to  0.000000
1/11/2011	4:55:25 PM	SiCl4 MFC set to  0.000000
1/11/2011	4:55:25 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	4:55:25 PM	Tube furnace set to 0
1/11/2011	4:55:26 PM	Run finished at 4:55 PM
1/11/2011	4:55:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	5:00:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:00:52 PM	Recipe started at 5:00 PM
1/11/2011	5:00:52 PM	Helium valve closed
1/11/2011	5:00:52 PM	H2 valve closed
1/11/2011	5:00:52 PM	BCl3 valve closed
1/11/2011	5:00:52 PM	PH3 valve closed
1/11/2011	5:00:52 PM	SiCl4 pre valve closed
1/11/2011	5:00:52 PM	SiCl4 post valve closed
1/11/2011	5:00:52 PM	Main Vac valve closed
1/11/2011	5:00:52 PM	Bubbler valve closed
1/11/2011	5:00:52 PM	Bypass valve opened
1/11/2011	5:00:52 PM	Helium MFC set to  0.000000
1/11/2011	5:00:52 PM	H2 MFC set to  0.000000
1/11/2011	5:00:52 PM	BCl3 MFC set to  0.000000
1/11/2011	5:00:52 PM	PHl3 MFC set to  0.000000
1/11/2011	5:00:52 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:00:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:00:53 PM	Tube furnace set to 0
1/11/2011	5:01:10 PM	Helium valve closed
1/11/2011	5:01:10 PM	H2 valve closed
1/11/2011	5:01:10 PM	BCl3 valve closed
1/11/2011	5:01:10 PM	PH3 valve closed
1/11/2011	5:01:10 PM	SiCl4 pre valve closed
1/11/2011	5:01:10 PM	SiCl4 post valve closed
1/11/2011	5:01:10 PM	Bubbler valve closed
1/11/2011	5:01:10 PM	Main Vac valve opened
1/11/2011	5:01:10 PM	Bypass valve opened
1/11/2011	5:01:10 PM	Helium MFC set to  0.000000
1/11/2011	5:01:10 PM	H2 MFC set to  0.000000
1/11/2011	5:01:10 PM	BCl3 MFC set to  0.000000
1/11/2011	5:01:10 PM	PHl3 MFC set to  0.000000
1/11/2011	5:01:10 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:01:10 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:01:10 PM	Tube furnace set to 0
1/11/2011	5:01:10 PM	Run finished at 5:01 PM
1/11/2011	5:01:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:02:24 PM	Bypass valve closed
1/11/2011	5:02:25 PM	Main Vac valve closed
1/11/2011	5:04:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:04:51 PM	Recipe started at 5:04 PM
1/11/2011	5:04:51 PM	Helium valve closed
1/11/2011	5:04:51 PM	H2 valve closed
1/11/2011	5:04:51 PM	BCl3 valve closed
1/11/2011	5:04:51 PM	PH3 valve closed
1/11/2011	5:04:51 PM	SiCl4 pre valve closed
1/11/2011	5:04:51 PM	SiCl4 post valve closed
1/11/2011	5:04:51 PM	Main Vac valve closed
1/11/2011	5:04:51 PM	Bubbler valve closed
1/11/2011	5:04:51 PM	Bypass valve opened
1/11/2011	5:04:51 PM	Helium MFC set to  0.000000
1/11/2011	5:04:51 PM	H2 MFC set to  0.000000
1/11/2011	5:04:51 PM	BCl3 MFC set to  0.000000
1/11/2011	5:04:51 PM	PHl3 MFC set to  0.000000
1/11/2011	5:04:51 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:04:51 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:04:51 PM	Tube furnace set to 0
1/11/2011	5:05:26 PM	Helium valve closed
1/11/2011	5:05:26 PM	H2 valve closed
1/11/2011	5:05:26 PM	BCl3 valve closed
1/11/2011	5:05:26 PM	PH3 valve closed
1/11/2011	5:05:26 PM	SiCl4 pre valve closed
1/11/2011	5:05:26 PM	SiCl4 post valve closed
1/11/2011	5:05:26 PM	Bubbler valve closed
1/11/2011	5:05:26 PM	Main Vac valve opened
1/11/2011	5:05:26 PM	Bypass valve opened
1/11/2011	5:05:26 PM	Helium MFC set to  0.000000
1/11/2011	5:05:26 PM	H2 MFC set to  0.000000
1/11/2011	5:05:26 PM	BCl3 MFC set to  0.000000
1/11/2011	5:05:26 PM	PHl3 MFC set to  0.000000
1/11/2011	5:05:26 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:05:26 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:05:26 PM	Tube furnace set to 0
1/11/2011	5:05:26 PM	Run finished at 5:05 PM
1/11/2011	5:05:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:05:57 PM	Bypass valve closed
1/11/2011	5:05:58 PM	Main Vac valve closed
1/11/2011	5:07:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:07:50 PM	Recipe started at 5:07 PM
1/11/2011	5:07:50 PM	Helium valve closed
1/11/2011	5:07:50 PM	H2 valve closed
1/11/2011	5:07:50 PM	BCl3 valve closed
1/11/2011	5:07:50 PM	PH3 valve closed
1/11/2011	5:07:50 PM	SiCl4 pre valve closed
1/11/2011	5:07:50 PM	SiCl4 post valve closed
1/11/2011	5:07:50 PM	Main Vac valve closed
1/11/2011	5:07:50 PM	Bubbler valve closed
1/11/2011	5:07:50 PM	Bypass valve opened
1/11/2011	5:07:50 PM	Helium MFC set to  0.000000
1/11/2011	5:07:50 PM	H2 MFC set to  0.000000
1/11/2011	5:07:50 PM	BCl3 MFC set to  0.000000
1/11/2011	5:07:50 PM	PHl3 MFC set to  0.000000
1/11/2011	5:07:50 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:07:50 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:07:50 PM	Tube furnace set to 0
1/11/2011	5:08:26 PM	Helium valve closed
1/11/2011	5:08:26 PM	H2 valve closed
1/11/2011	5:08:26 PM	BCl3 valve closed
1/11/2011	5:08:26 PM	PH3 valve closed
1/11/2011	5:08:26 PM	SiCl4 pre valve closed
1/11/2011	5:08:26 PM	SiCl4 post valve closed
1/11/2011	5:08:26 PM	Bubbler valve closed
1/11/2011	5:08:26 PM	Main Vac valve opened
1/11/2011	5:08:26 PM	Bypass valve opened
1/11/2011	5:08:26 PM	Helium MFC set to  0.000000
1/11/2011	5:08:26 PM	H2 MFC set to  0.000000
1/11/2011	5:08:26 PM	BCl3 MFC set to  0.000000
1/11/2011	5:08:26 PM	PHl3 MFC set to  0.000000
1/11/2011	5:08:26 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:08:26 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:08:26 PM	Tube furnace set to 0
1/11/2011	5:08:26 PM	Run finished at 5:08 PM
1/11/2011	5:08:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:10:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	5:10:28 PM	Recipe started at 5:10 PM
1/11/2011	5:10:28 PM	H2 valve closed
1/11/2011	5:10:28 PM	BCl3 valve closed
1/11/2011	5:10:28 PM	PH3 valve closed
1/11/2011	5:10:28 PM	SiCl4 pre valve closed
1/11/2011	5:10:28 PM	SiCl4 post valve closed
1/11/2011	5:10:28 PM	Main Vac valve closed
1/11/2011	5:10:28 PM	Bypass valve closed
1/11/2011	5:10:28 PM	Bubbler valve closed
1/11/2011	5:10:28 PM	Helium valve opened
1/11/2011	5:10:28 PM	Helium MFC set to  500.000000
1/11/2011	5:10:28 PM	H2 MFC set to  0.000000
1/11/2011	5:10:28 PM	BCl3 MFC set to  0.000000
1/11/2011	5:10:28 PM	PHl3 MFC set to  0.000000
1/11/2011	5:10:28 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:10:28 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:10:28 PM	Tube furnace set to 0
1/11/2011	5:11:45 PM	Helium valve closed
1/11/2011	5:11:45 PM	H2 valve closed
1/11/2011	5:11:45 PM	BCl3 valve closed
1/11/2011	5:11:45 PM	PH3 valve closed
1/11/2011	5:11:45 PM	SiCl4 pre valve closed
1/11/2011	5:11:45 PM	SiCl4 post valve closed
1/11/2011	5:11:45 PM	Main Vac valve closed
1/11/2011	5:11:45 PM	Bypass valve closed
1/11/2011	5:11:45 PM	Bubbler valve closed
1/11/2011	5:11:45 PM	Helium MFC set to  0.000000
1/11/2011	5:11:45 PM	H2 MFC set to  0.000000
1/11/2011	5:11:45 PM	BCl3 MFC set to  0.000000
1/11/2011	5:11:45 PM	PHl3 MFC set to  0.000000
1/11/2011	5:11:45 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:11:45 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:11:45 PM	Tube furnace set to 0
1/11/2011	5:11:45 PM	Run finished at 5:11 PM
1/11/2011	5:11:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	5:45:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:45:40 PM	Recipe started at 5:45 PM
1/11/2011	5:45:40 PM	Helium valve closed
1/11/2011	5:45:40 PM	H2 valve closed
1/11/2011	5:45:40 PM	BCl3 valve closed
1/11/2011	5:45:40 PM	PH3 valve closed
1/11/2011	5:45:40 PM	SiCl4 pre valve closed
1/11/2011	5:45:40 PM	SiCl4 post valve closed
1/11/2011	5:45:40 PM	Main Vac valve closed
1/11/2011	5:45:40 PM	Bubbler valve closed
1/11/2011	5:45:40 PM	Bypass valve opened
1/11/2011	5:45:40 PM	Helium MFC set to  0.000000
1/11/2011	5:45:40 PM	H2 MFC set to  0.000000
1/11/2011	5:45:40 PM	BCl3 MFC set to  0.000000
1/11/2011	5:45:40 PM	PHl3 MFC set to  0.000000
1/11/2011	5:45:40 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:45:40 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:45:40 PM	Tube furnace set to 0
1/11/2011	5:46:17 PM	Helium valve closed
1/11/2011	5:46:17 PM	H2 valve closed
1/11/2011	5:46:17 PM	BCl3 valve closed
1/11/2011	5:46:17 PM	PH3 valve closed
1/11/2011	5:46:17 PM	SiCl4 pre valve closed
1/11/2011	5:46:17 PM	SiCl4 post valve closed
1/11/2011	5:46:17 PM	Bubbler valve closed
1/11/2011	5:46:17 PM	Main Vac valve opened
1/11/2011	5:46:17 PM	Bypass valve opened
1/11/2011	5:46:17 PM	Helium MFC set to  0.000000
1/11/2011	5:46:17 PM	H2 MFC set to  0.000000
1/11/2011	5:46:17 PM	BCl3 MFC set to  0.000000
1/11/2011	5:46:17 PM	PHl3 MFC set to  0.000000
1/11/2011	5:46:17 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:46:17 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:46:17 PM	Tube furnace set to 0
1/11/2011	5:46:17 PM	Run finished at 5:46 PM
1/11/2011	5:46:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	5:51:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	5:52:03 PM	Recipe started at 5:51 PM
1/11/2011	5:52:03 PM	Helium valve closed
1/11/2011	5:52:03 PM	H2 valve closed
1/11/2011	5:52:03 PM	BCl3 valve closed
1/11/2011	5:52:03 PM	PH3 valve closed
1/11/2011	5:52:03 PM	SiCl4 pre valve closed
1/11/2011	5:52:03 PM	SiCl4 post valve closed
1/11/2011	5:52:03 PM	Main Vac valve closed
1/11/2011	5:52:03 PM	Bubbler valve closed
1/11/2011	5:52:03 PM	Bypass valve opened
1/11/2011	5:52:03 PM	Helium MFC set to  0.000000
1/11/2011	5:52:03 PM	H2 MFC set to  0.000000
1/11/2011	5:52:03 PM	BCl3 MFC set to  0.000000
1/11/2011	5:52:03 PM	PHl3 MFC set to  0.000000
1/11/2011	5:52:03 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:52:03 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:52:03 PM	Tube furnace set to 0
1/11/2011	5:52:03 PM	Helium valve closed
1/11/2011	5:52:03 PM	H2 valve closed
1/11/2011	5:52:03 PM	BCl3 valve closed
1/11/2011	5:52:03 PM	PH3 valve closed
1/11/2011	5:52:03 PM	SiCl4 pre valve closed
1/11/2011	5:52:03 PM	SiCl4 post valve closed
1/11/2011	5:52:03 PM	Bubbler valve closed
1/11/2011	5:52:03 PM	Main Vac valve opened
1/11/2011	5:52:03 PM	Bypass valve opened
1/11/2011	5:52:03 PM	Helium MFC set to  0.000000
1/11/2011	5:52:03 PM	H2 MFC set to  0.000000
1/11/2011	5:52:03 PM	BCl3 MFC set to  0.000000
1/11/2011	5:52:03 PM	PHl3 MFC set to  0.000000
1/11/2011	5:52:03 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:52:03 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:52:03 PM	Tube furnace set to 0
1/11/2011	5:52:12 PM	H2 valve closed
1/11/2011	5:52:12 PM	BCl3 valve closed
1/11/2011	5:52:12 PM	PH3 valve closed
1/11/2011	5:52:12 PM	SiCl4 pre valve closed
1/11/2011	5:52:12 PM	SiCl4 post valve closed
1/11/2011	5:52:12 PM	Bubbler valve closed
1/11/2011	5:52:12 PM	Helium valve opened
1/11/2011	5:52:12 PM	Main Vac valve opened
1/11/2011	5:52:12 PM	Bypass valve opened
1/11/2011	5:52:12 PM	Helium MFC set to  100.000000
1/11/2011	5:52:12 PM	H2 MFC set to  0.000000
1/11/2011	5:52:12 PM	BCl3 MFC set to  0.000000
1/11/2011	5:52:12 PM	PHl3 MFC set to  0.000000
1/11/2011	5:52:12 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:52:12 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:52:12 PM	Tube furnace set to 0
1/11/2011	5:53:12 PM	Helium valve closed
1/11/2011	5:53:12 PM	H2 valve closed
1/11/2011	5:53:12 PM	BCl3 valve closed
1/11/2011	5:53:12 PM	PH3 valve closed
1/11/2011	5:53:12 PM	SiCl4 pre valve closed
1/11/2011	5:53:12 PM	SiCl4 post valve closed
1/11/2011	5:53:12 PM	Bubbler valve closed
1/11/2011	5:53:12 PM	Main Vac valve opened
1/11/2011	5:53:12 PM	Bypass valve opened
1/11/2011	5:53:12 PM	Helium MFC set to  0.000000
1/11/2011	5:53:12 PM	H2 MFC set to  0.000000
1/11/2011	5:53:12 PM	BCl3 MFC set to  0.000000
1/11/2011	5:53:12 PM	PHl3 MFC set to  0.000000
1/11/2011	5:53:12 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:53:12 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:53:12 PM	Tube furnace set to 0
1/11/2011	5:54:12 PM	H2 valve closed
1/11/2011	5:54:12 PM	BCl3 valve closed
1/11/2011	5:54:12 PM	PH3 valve closed
1/11/2011	5:54:12 PM	SiCl4 pre valve closed
1/11/2011	5:54:12 PM	SiCl4 post valve closed
1/11/2011	5:54:12 PM	Bubbler valve closed
1/11/2011	5:54:12 PM	Helium valve opened
1/11/2011	5:54:12 PM	Main Vac valve opened
1/11/2011	5:54:12 PM	Bypass valve opened
1/11/2011	5:54:12 PM	Helium MFC set to  100.000000
1/11/2011	5:54:12 PM	H2 MFC set to  0.000000
1/11/2011	5:54:12 PM	BCl3 MFC set to  0.000000
1/11/2011	5:54:12 PM	PHl3 MFC set to  0.000000
1/11/2011	5:54:12 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:54:12 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:54:13 PM	Tube furnace set to 0
1/11/2011	5:55:13 PM	Helium valve closed
1/11/2011	5:55:13 PM	H2 valve closed
1/11/2011	5:55:13 PM	BCl3 valve closed
1/11/2011	5:55:13 PM	PH3 valve closed
1/11/2011	5:55:13 PM	SiCl4 pre valve closed
1/11/2011	5:55:13 PM	SiCl4 post valve closed
1/11/2011	5:55:13 PM	Bubbler valve closed
1/11/2011	5:55:13 PM	Main Vac valve opened
1/11/2011	5:55:13 PM	Bypass valve opened
1/11/2011	5:55:13 PM	Helium MFC set to  0.000000
1/11/2011	5:55:13 PM	H2 MFC set to  0.000000
1/11/2011	5:55:13 PM	BCl3 MFC set to  0.000000
1/11/2011	5:55:13 PM	PHl3 MFC set to  0.000000
1/11/2011	5:55:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:55:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:55:13 PM	Tube furnace set to 0
1/11/2011	5:56:13 PM	H2 valve closed
1/11/2011	5:56:13 PM	BCl3 valve closed
1/11/2011	5:56:13 PM	PH3 valve closed
1/11/2011	5:56:13 PM	SiCl4 pre valve closed
1/11/2011	5:56:13 PM	SiCl4 post valve closed
1/11/2011	5:56:13 PM	Bubbler valve closed
1/11/2011	5:56:13 PM	Helium valve opened
1/11/2011	5:56:13 PM	Main Vac valve opened
1/11/2011	5:56:13 PM	Bypass valve opened
1/11/2011	5:56:13 PM	Helium MFC set to  100.000000
1/11/2011	5:56:13 PM	H2 MFC set to  0.000000
1/11/2011	5:56:13 PM	BCl3 MFC set to  0.000000
1/11/2011	5:56:13 PM	PHl3 MFC set to  0.000000
1/11/2011	5:56:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:56:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:56:13 PM	Tube furnace set to 0
1/11/2011	5:57:13 PM	Helium valve closed
1/11/2011	5:57:13 PM	H2 valve closed
1/11/2011	5:57:13 PM	BCl3 valve closed
1/11/2011	5:57:13 PM	PH3 valve closed
1/11/2011	5:57:13 PM	SiCl4 pre valve closed
1/11/2011	5:57:13 PM	SiCl4 post valve closed
1/11/2011	5:57:13 PM	Bubbler valve closed
1/11/2011	5:57:13 PM	Main Vac valve opened
1/11/2011	5:57:13 PM	Bypass valve opened
1/11/2011	5:57:13 PM	Helium MFC set to  0.000000
1/11/2011	5:57:13 PM	H2 MFC set to  0.000000
1/11/2011	5:57:13 PM	BCl3 MFC set to  0.000000
1/11/2011	5:57:13 PM	PHl3 MFC set to  0.000000
1/11/2011	5:57:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:57:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:57:13 PM	Tube furnace set to 0
1/11/2011	5:58:13 PM	H2 valve closed
1/11/2011	5:58:13 PM	BCl3 valve closed
1/11/2011	5:58:13 PM	PH3 valve closed
1/11/2011	5:58:13 PM	SiCl4 pre valve closed
1/11/2011	5:58:13 PM	SiCl4 post valve closed
1/11/2011	5:58:13 PM	Bubbler valve closed
1/11/2011	5:58:13 PM	Helium valve opened
1/11/2011	5:58:13 PM	Main Vac valve opened
1/11/2011	5:58:13 PM	Bypass valve opened
1/11/2011	5:58:13 PM	Helium MFC set to  100.000000
1/11/2011	5:58:13 PM	H2 MFC set to  0.000000
1/11/2011	5:58:13 PM	BCl3 MFC set to  0.000000
1/11/2011	5:58:13 PM	PHl3 MFC set to  0.000000
1/11/2011	5:58:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:58:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:58:13 PM	Tube furnace set to 0
1/11/2011	5:59:13 PM	Helium valve closed
1/11/2011	5:59:13 PM	H2 valve closed
1/11/2011	5:59:13 PM	BCl3 valve closed
1/11/2011	5:59:13 PM	PH3 valve closed
1/11/2011	5:59:13 PM	SiCl4 pre valve closed
1/11/2011	5:59:13 PM	SiCl4 post valve closed
1/11/2011	5:59:13 PM	Bubbler valve closed
1/11/2011	5:59:13 PM	Main Vac valve opened
1/11/2011	5:59:13 PM	Bypass valve opened
1/11/2011	5:59:13 PM	Helium MFC set to  0.000000
1/11/2011	5:59:13 PM	H2 MFC set to  0.000000
1/11/2011	5:59:13 PM	BCl3 MFC set to  0.000000
1/11/2011	5:59:13 PM	PHl3 MFC set to  0.000000
1/11/2011	5:59:13 PM	SiCl4 MFC set to  0.000000
1/11/2011	5:59:13 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	5:59:14 PM	Tube furnace set to 0
1/11/2011	6:00:14 PM	H2 valve closed
1/11/2011	6:00:14 PM	BCl3 valve closed
1/11/2011	6:00:14 PM	PH3 valve closed
1/11/2011	6:00:14 PM	SiCl4 pre valve closed
1/11/2011	6:00:14 PM	SiCl4 post valve closed
1/11/2011	6:00:14 PM	Bubbler valve closed
1/11/2011	6:00:14 PM	Helium valve opened
1/11/2011	6:00:14 PM	Main Vac valve opened
1/11/2011	6:00:14 PM	Bypass valve opened
1/11/2011	6:00:14 PM	Helium MFC set to  100.000000
1/11/2011	6:00:14 PM	H2 MFC set to  0.000000
1/11/2011	6:00:14 PM	BCl3 MFC set to  0.000000
1/11/2011	6:00:14 PM	PHl3 MFC set to  0.000000
1/11/2011	6:00:14 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:00:14 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:00:14 PM	Tube furnace set to 0
1/11/2011	6:01:14 PM	Helium valve closed
1/11/2011	6:01:14 PM	H2 valve closed
1/11/2011	6:01:14 PM	BCl3 valve closed
1/11/2011	6:01:14 PM	PH3 valve closed
1/11/2011	6:01:14 PM	SiCl4 pre valve closed
1/11/2011	6:01:14 PM	SiCl4 post valve closed
1/11/2011	6:01:14 PM	Bubbler valve closed
1/11/2011	6:01:14 PM	Main Vac valve opened
1/11/2011	6:01:14 PM	Bypass valve opened
1/11/2011	6:01:14 PM	Helium MFC set to  0.000000
1/11/2011	6:01:14 PM	H2 MFC set to  0.000000
1/11/2011	6:01:14 PM	BCl3 MFC set to  0.000000
1/11/2011	6:01:14 PM	PHl3 MFC set to  0.000000
1/11/2011	6:01:14 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:01:14 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:01:14 PM	Tube furnace set to 0
1/11/2011	6:02:14 PM	H2 valve closed
1/11/2011	6:02:14 PM	BCl3 valve closed
1/11/2011	6:02:14 PM	PH3 valve closed
1/11/2011	6:02:14 PM	SiCl4 pre valve closed
1/11/2011	6:02:14 PM	SiCl4 post valve closed
1/11/2011	6:02:14 PM	Bubbler valve closed
1/11/2011	6:02:14 PM	Helium valve opened
1/11/2011	6:02:14 PM	Main Vac valve opened
1/11/2011	6:02:14 PM	Bypass valve opened
1/11/2011	6:02:14 PM	Helium MFC set to  100.000000
1/11/2011	6:02:14 PM	H2 MFC set to  0.000000
1/11/2011	6:02:14 PM	BCl3 MFC set to  0.000000
1/11/2011	6:02:14 PM	PHl3 MFC set to  0.000000
1/11/2011	6:02:14 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:02:14 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:02:14 PM	Tube furnace set to 0
1/11/2011	6:03:14 PM	Helium valve closed
1/11/2011	6:03:14 PM	H2 valve closed
1/11/2011	6:03:14 PM	BCl3 valve closed
1/11/2011	6:03:14 PM	PH3 valve closed
1/11/2011	6:03:14 PM	SiCl4 pre valve closed
1/11/2011	6:03:14 PM	SiCl4 post valve closed
1/11/2011	6:03:14 PM	Bubbler valve closed
1/11/2011	6:03:14 PM	Main Vac valve opened
1/11/2011	6:03:14 PM	Bypass valve opened
1/11/2011	6:03:14 PM	Helium MFC set to  0.000000
1/11/2011	6:03:14 PM	H2 MFC set to  0.000000
1/11/2011	6:03:14 PM	BCl3 MFC set to  0.000000
1/11/2011	6:03:14 PM	PHl3 MFC set to  0.000000
1/11/2011	6:03:14 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:03:14 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:03:14 PM	Tube furnace set to 0
1/11/2011	6:04:14 PM	H2 valve closed
1/11/2011	6:04:14 PM	BCl3 valve closed
1/11/2011	6:04:14 PM	PH3 valve closed
1/11/2011	6:04:14 PM	SiCl4 pre valve closed
1/11/2011	6:04:14 PM	SiCl4 post valve closed
1/11/2011	6:04:14 PM	Bubbler valve closed
1/11/2011	6:04:14 PM	Helium valve opened
1/11/2011	6:04:14 PM	Main Vac valve opened
1/11/2011	6:04:14 PM	Bypass valve opened
1/11/2011	6:04:14 PM	Helium MFC set to  100.000000
1/11/2011	6:04:14 PM	H2 MFC set to  0.000000
1/11/2011	6:04:14 PM	BCl3 MFC set to  0.000000
1/11/2011	6:04:14 PM	PHl3 MFC set to  0.000000
1/11/2011	6:04:14 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:04:14 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:04:15 PM	Tube furnace set to 0
1/11/2011	6:05:15 PM	Helium valve closed
1/11/2011	6:05:15 PM	H2 valve closed
1/11/2011	6:05:15 PM	BCl3 valve closed
1/11/2011	6:05:15 PM	PH3 valve closed
1/11/2011	6:05:15 PM	SiCl4 pre valve closed
1/11/2011	6:05:15 PM	SiCl4 post valve closed
1/11/2011	6:05:15 PM	Bubbler valve closed
1/11/2011	6:05:15 PM	Main Vac valve opened
1/11/2011	6:05:15 PM	Bypass valve opened
1/11/2011	6:05:15 PM	Helium MFC set to  0.000000
1/11/2011	6:05:15 PM	H2 MFC set to  0.000000
1/11/2011	6:05:15 PM	BCl3 MFC set to  0.000000
1/11/2011	6:05:15 PM	PHl3 MFC set to  0.000000
1/11/2011	6:05:15 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:05:15 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:05:15 PM	Tube furnace set to 0
1/11/2011	6:06:11 PM	Run aborted at 6:06 PM
1/11/2011	6:06:11 PM	Helium valve closed
1/11/2011	6:06:11 PM	H2 valve closed
1/11/2011	6:06:11 PM	BCl3 valve closed
1/11/2011	6:06:11 PM	PH3 valve closed
1/11/2011	6:06:11 PM	SiCl4 pre valve closed
1/11/2011	6:06:11 PM	SiCl4 post valve closed
1/11/2011	6:06:11 PM	Bypass valve closed
1/11/2011	6:06:11 PM	Main Vac valve closed
1/11/2011	6:06:11 PM	Bubbler valve closed
1/11/2011	6:06:11 PM	Helium MFC set to  0.000000
1/11/2011	6:06:11 PM	H2 MFC set to  0.000000
1/11/2011	6:06:11 PM	BCl3 MFC set to  0.000000
1/11/2011	6:06:11 PM	PHl3 MFC set to  0.000000
1/11/2011	6:06:11 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:06:11 PM	Tube furnace set to 0
1/11/2011	6:06:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/11/2011	6:06:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	6:06:15 PM	Recipe started at 6:06 PM
1/11/2011	6:06:15 PM	H2 valve closed
1/11/2011	6:06:15 PM	BCl3 valve closed
1/11/2011	6:06:15 PM	PH3 valve closed
1/11/2011	6:06:15 PM	SiCl4 pre valve closed
1/11/2011	6:06:15 PM	SiCl4 post valve closed
1/11/2011	6:06:15 PM	Main Vac valve closed
1/11/2011	6:06:15 PM	Bypass valve closed
1/11/2011	6:06:15 PM	Bubbler valve closed
1/11/2011	6:06:15 PM	Helium valve opened
1/11/2011	6:06:15 PM	Helium MFC set to  500.000000
1/11/2011	6:06:15 PM	H2 MFC set to  0.000000
1/11/2011	6:06:15 PM	BCl3 MFC set to  0.000000
1/11/2011	6:06:15 PM	PHl3 MFC set to  0.000000
1/11/2011	6:06:15 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:06:15 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:06:15 PM	Tube furnace set to 0
1/11/2011	6:07:35 PM	Helium valve closed
1/11/2011	6:07:35 PM	H2 valve closed
1/11/2011	6:07:35 PM	BCl3 valve closed
1/11/2011	6:07:35 PM	PH3 valve closed
1/11/2011	6:07:35 PM	SiCl4 pre valve closed
1/11/2011	6:07:35 PM	SiCl4 post valve closed
1/11/2011	6:07:35 PM	Main Vac valve closed
1/11/2011	6:07:35 PM	Bypass valve closed
1/11/2011	6:07:35 PM	Bubbler valve closed
1/11/2011	6:07:35 PM	Helium MFC set to  0.000000
1/11/2011	6:07:35 PM	H2 MFC set to  0.000000
1/11/2011	6:07:35 PM	BCl3 MFC set to  0.000000
1/11/2011	6:07:35 PM	PHl3 MFC set to  0.000000
1/11/2011	6:07:35 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:07:35 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:07:35 PM	Tube furnace set to 0
1/11/2011	6:07:35 PM	Run finished at 6:07 PM
1/11/2011	6:07:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	6:09:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	6:09:24 PM	Recipe started at 6:09 PM
1/11/2011	6:09:24 PM	Helium valve closed
1/11/2011	6:09:24 PM	H2 valve closed
1/11/2011	6:09:24 PM	BCl3 valve closed
1/11/2011	6:09:24 PM	PH3 valve closed
1/11/2011	6:09:24 PM	SiCl4 pre valve closed
1/11/2011	6:09:24 PM	SiCl4 post valve closed
1/11/2011	6:09:24 PM	Main Vac valve closed
1/11/2011	6:09:24 PM	Bubbler valve closed
1/11/2011	6:09:24 PM	Bypass valve opened
1/11/2011	6:09:24 PM	Helium MFC set to  0.000000
1/11/2011	6:09:24 PM	H2 MFC set to  0.000000
1/11/2011	6:09:24 PM	BCl3 MFC set to  0.000000
1/11/2011	6:09:24 PM	PHl3 MFC set to  0.000000
1/11/2011	6:09:24 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:09:24 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:09:24 PM	Tube furnace set to 0
1/11/2011	6:09:55 PM	Helium valve closed
1/11/2011	6:09:55 PM	H2 valve closed
1/11/2011	6:09:55 PM	BCl3 valve closed
1/11/2011	6:09:55 PM	PH3 valve closed
1/11/2011	6:09:55 PM	SiCl4 pre valve closed
1/11/2011	6:09:55 PM	SiCl4 post valve closed
1/11/2011	6:09:55 PM	Bubbler valve closed
1/11/2011	6:09:55 PM	Main Vac valve opened
1/11/2011	6:09:55 PM	Bypass valve opened
1/11/2011	6:09:55 PM	Helium MFC set to  0.000000
1/11/2011	6:09:55 PM	H2 MFC set to  0.000000
1/11/2011	6:09:55 PM	BCl3 MFC set to  0.000000
1/11/2011	6:09:55 PM	PHl3 MFC set to  0.000000
1/11/2011	6:09:55 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:09:55 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:09:55 PM	Tube furnace set to 0
1/11/2011	6:09:55 PM	Run finished at 6:09 PM
1/11/2011	6:09:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	6:51:48 PM	Recipe started at 6:51 PM
1/11/2011	6:51:48 PM	Helium valve closed
1/11/2011	6:51:48 PM	BCl3 valve closed
1/11/2011	6:51:48 PM	PH3 valve closed
1/11/2011	6:51:48 PM	SiCl4 pre valve closed
1/11/2011	6:51:48 PM	SiCl4 post valve closed
1/11/2011	6:51:48 PM	Main Vac valve closed
1/11/2011	6:51:48 PM	Bypass valve closed
1/11/2011	6:51:48 PM	Bubbler valve closed
1/11/2011	6:51:48 PM	H2 valve opened
1/11/2011	6:51:48 PM	Helium MFC set to  0.000000
1/11/2011	6:51:48 PM	H2 MFC set to  500.000000
1/11/2011	6:51:48 PM	BCl3 MFC set to  0.000000
1/11/2011	6:51:48 PM	PHl3 MFC set to  0.000000
1/11/2011	6:51:48 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:51:48 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:51:48 PM	Tube furnace set to 0
1/11/2011	6:53:11 PM	Helium valve closed
1/11/2011	6:53:11 PM	BCl3 valve closed
1/11/2011	6:53:11 PM	PH3 valve closed
1/11/2011	6:53:11 PM	SiCl4 pre valve closed
1/11/2011	6:53:11 PM	SiCl4 post valve closed
1/11/2011	6:53:11 PM	Main Vac valve closed
1/11/2011	6:53:11 PM	Bypass valve closed
1/11/2011	6:53:11 PM	H2 valve opened
1/11/2011	6:53:11 PM	Bubbler valve opened
1/11/2011	6:53:11 PM	Helium MFC set to  0.000000
1/11/2011	6:53:11 PM	H2 MFC set to  500.000000
1/11/2011	6:53:11 PM	BCl3 MFC set to  0.000000
1/11/2011	6:53:11 PM	PHl3 MFC set to  0.000000
1/11/2011	6:53:11 PM	SiCl4 MFC set to  0.000000
1/11/2011	6:53:11 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	6:53:11 PM	Tube furnace set to 1000
1/11/2011	7:13:11 PM	Helium valve closed
1/11/2011	7:13:11 PM	PH3 valve closed
1/11/2011	7:13:11 PM	Main Vac valve closed
1/11/2011	7:13:11 PM	Bypass valve closed
1/11/2011	7:13:11 PM	H2 valve opened
1/11/2011	7:13:11 PM	BCl3 valve opened
1/11/2011	7:13:11 PM	SiCl4 pre valve opened
1/11/2011	7:13:11 PM	SiCl4 post valve opened
1/11/2011	7:13:11 PM	Bubbler valve opened
1/11/2011	7:13:11 PM	Helium MFC set to  0.000000
1/11/2011	7:13:11 PM	H2 MFC set to  500.000000
1/11/2011	7:13:11 PM	BCl3 MFC set to  3.000000
1/11/2011	7:13:11 PM	PHl3 MFC set to  0.000000
1/11/2011	7:13:11 PM	SiCl4 MFC set to  50.000000
1/11/2011	7:13:11 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	7:13:11 PM	Tube furnace set to 1000
1/11/2011	7:43:11 PM	H2 valve closed
1/11/2011	7:43:11 PM	BCl3 valve closed
1/11/2011	7:43:11 PM	PH3 valve closed
1/11/2011	7:43:11 PM	SiCl4 pre valve closed
1/11/2011	7:43:11 PM	SiCl4 post valve closed
1/11/2011	7:43:11 PM	Main Vac valve closed
1/11/2011	7:43:11 PM	Bypass valve closed
1/11/2011	7:43:11 PM	Helium valve opened
1/11/2011	7:43:11 PM	Bubbler valve opened
1/11/2011	7:43:11 PM	Helium MFC set to  500.000000
1/11/2011	7:43:11 PM	H2 MFC set to  0.000000
1/11/2011	7:43:11 PM	BCl3 MFC set to  0.000000
1/11/2011	7:43:11 PM	PHl3 MFC set to  0.000000
1/11/2011	7:43:11 PM	SiCl4 MFC set to  0.000000
1/11/2011	7:43:11 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	7:43:11 PM	Tube furnace set to 0
1/11/2011	8:03:12 PM	Helium valve closed
1/11/2011	8:03:12 PM	H2 valve closed
1/11/2011	8:03:12 PM	BCl3 valve closed
1/11/2011	8:03:12 PM	PH3 valve closed
1/11/2011	8:03:12 PM	SiCl4 pre valve closed
1/11/2011	8:03:12 PM	SiCl4 post valve closed
1/11/2011	8:03:12 PM	Main Vac valve closed
1/11/2011	8:03:12 PM	Bypass valve closed
1/11/2011	8:03:12 PM	Bubbler valve closed
1/11/2011	8:03:12 PM	Helium MFC set to  0.000000
1/11/2011	8:03:12 PM	H2 MFC set to  0.000000
1/11/2011	8:03:12 PM	BCl3 MFC set to  0.000000
1/11/2011	8:03:12 PM	PHl3 MFC set to  0.000000
1/11/2011	8:03:12 PM	SiCl4 MFC set to  0.000000
1/11/2011	8:03:12 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	8:03:12 PM	Tube furnace set to 0
1/11/2011	8:03:12 PM	Run finished at 8:03 PM
1/11/2011	9:09:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	9:09:38 PM	Recipe started at 9:09 PM
1/11/2011	9:09:38 PM	H2 valve closed
1/11/2011	9:09:38 PM	BCl3 valve closed
1/11/2011	9:09:38 PM	PH3 valve closed
1/11/2011	9:09:38 PM	SiCl4 pre valve closed
1/11/2011	9:09:38 PM	SiCl4 post valve closed
1/11/2011	9:09:38 PM	Main Vac valve closed
1/11/2011	9:09:38 PM	Bypass valve closed
1/11/2011	9:09:38 PM	Bubbler valve closed
1/11/2011	9:09:38 PM	Helium valve opened
1/11/2011	9:09:38 PM	Helium MFC set to  500.000000
1/11/2011	9:09:38 PM	H2 MFC set to  0.000000
1/11/2011	9:09:38 PM	BCl3 MFC set to  0.000000
1/11/2011	9:09:38 PM	PHl3 MFC set to  0.000000
1/11/2011	9:09:38 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:09:38 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:09:38 PM	Tube furnace set to 0
1/11/2011	9:09:41 PM	Helium valve closed
1/11/2011	9:09:41 PM	H2 valve closed
1/11/2011	9:09:41 PM	BCl3 valve closed
1/11/2011	9:09:41 PM	PH3 valve closed
1/11/2011	9:09:41 PM	SiCl4 pre valve closed
1/11/2011	9:09:41 PM	SiCl4 post valve closed
1/11/2011	9:09:41 PM	Main Vac valve closed
1/11/2011	9:09:41 PM	Bypass valve closed
1/11/2011	9:09:41 PM	Bubbler valve closed
1/11/2011	9:09:41 PM	Helium MFC set to  0.000000
1/11/2011	9:09:41 PM	H2 MFC set to  0.000000
1/11/2011	9:09:41 PM	BCl3 MFC set to  0.000000
1/11/2011	9:09:41 PM	PHl3 MFC set to  0.000000
1/11/2011	9:09:41 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:09:41 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:09:41 PM	Tube furnace set to 0
1/11/2011	9:09:41 PM	Run finished at 9:09 PM
1/11/2011	9:09:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	9:15:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	9:15:27 PM	Recipe started at 9:15 PM
1/11/2011	9:15:27 PM	Helium valve closed
1/11/2011	9:15:27 PM	H2 valve closed
1/11/2011	9:15:27 PM	BCl3 valve closed
1/11/2011	9:15:27 PM	PH3 valve closed
1/11/2011	9:15:27 PM	SiCl4 pre valve closed
1/11/2011	9:15:27 PM	SiCl4 post valve closed
1/11/2011	9:15:27 PM	Main Vac valve closed
1/11/2011	9:15:27 PM	Bubbler valve closed
1/11/2011	9:15:27 PM	Bypass valve opened
1/11/2011	9:15:27 PM	Helium MFC set to  0.000000
1/11/2011	9:15:27 PM	H2 MFC set to  0.000000
1/11/2011	9:15:27 PM	BCl3 MFC set to  0.000000
1/11/2011	9:15:27 PM	PHl3 MFC set to  0.000000
1/11/2011	9:15:27 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:15:27 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:15:27 PM	Tube furnace set to 0
1/11/2011	9:15:58 PM	Helium valve closed
1/11/2011	9:15:58 PM	H2 valve closed
1/11/2011	9:15:58 PM	BCl3 valve closed
1/11/2011	9:15:58 PM	PH3 valve closed
1/11/2011	9:15:58 PM	SiCl4 pre valve closed
1/11/2011	9:15:58 PM	SiCl4 post valve closed
1/11/2011	9:15:58 PM	Bubbler valve closed
1/11/2011	9:15:58 PM	Main Vac valve opened
1/11/2011	9:15:58 PM	Bypass valve opened
1/11/2011	9:15:58 PM	Helium MFC set to  0.000000
1/11/2011	9:15:58 PM	H2 MFC set to  0.000000
1/11/2011	9:15:58 PM	BCl3 MFC set to  0.000000
1/11/2011	9:15:58 PM	PHl3 MFC set to  0.000000
1/11/2011	9:15:58 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:15:58 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:15:58 PM	Tube furnace set to 0
1/11/2011	9:15:58 PM	Run finished at 9:15 PM
1/11/2011	9:15:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	9:38:33 PM	Recipe started at 9:38 PM
1/11/2011	9:38:33 PM	Helium valve closed
1/11/2011	9:38:33 PM	BCl3 valve closed
1/11/2011	9:38:33 PM	PH3 valve closed
1/11/2011	9:38:33 PM	SiCl4 pre valve closed
1/11/2011	9:38:33 PM	SiCl4 post valve closed
1/11/2011	9:38:33 PM	Main Vac valve closed
1/11/2011	9:38:33 PM	Bypass valve closed
1/11/2011	9:38:33 PM	Bubbler valve closed
1/11/2011	9:38:33 PM	H2 valve opened
1/11/2011	9:38:33 PM	Helium MFC set to  0.000000
1/11/2011	9:38:33 PM	H2 MFC set to  500.000000
1/11/2011	9:38:33 PM	BCl3 MFC set to  0.000000
1/11/2011	9:38:33 PM	PHl3 MFC set to  0.000000
1/11/2011	9:38:33 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:38:33 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:38:33 PM	Tube furnace set to 0
1/11/2011	9:39:52 PM	Helium valve closed
1/11/2011	9:39:52 PM	BCl3 valve closed
1/11/2011	9:39:52 PM	PH3 valve closed
1/11/2011	9:39:52 PM	SiCl4 pre valve closed
1/11/2011	9:39:52 PM	SiCl4 post valve closed
1/11/2011	9:39:52 PM	Main Vac valve closed
1/11/2011	9:39:52 PM	Bypass valve closed
1/11/2011	9:39:52 PM	H2 valve opened
1/11/2011	9:39:52 PM	Bubbler valve opened
1/11/2011	9:39:52 PM	Helium MFC set to  0.000000
1/11/2011	9:39:52 PM	H2 MFC set to  500.000000
1/11/2011	9:39:52 PM	BCl3 MFC set to  0.000000
1/11/2011	9:39:52 PM	PHl3 MFC set to  0.000000
1/11/2011	9:39:52 PM	SiCl4 MFC set to  0.000000
1/11/2011	9:39:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:39:52 PM	Tube furnace set to 1000
1/11/2011	9:59:52 PM	Helium valve closed
1/11/2011	9:59:52 PM	PH3 valve closed
1/11/2011	9:59:52 PM	Main Vac valve closed
1/11/2011	9:59:52 PM	Bypass valve closed
1/11/2011	9:59:52 PM	H2 valve opened
1/11/2011	9:59:52 PM	BCl3 valve opened
1/11/2011	9:59:52 PM	SiCl4 pre valve opened
1/11/2011	9:59:52 PM	SiCl4 post valve opened
1/11/2011	9:59:52 PM	Bubbler valve opened
1/11/2011	9:59:52 PM	Helium MFC set to  0.000000
1/11/2011	9:59:52 PM	H2 MFC set to  500.000000
1/11/2011	9:59:52 PM	BCl3 MFC set to  3.000000
1/11/2011	9:59:52 PM	PHl3 MFC set to  0.000000
1/11/2011	9:59:52 PM	SiCl4 MFC set to  50.000000
1/11/2011	9:59:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	9:59:52 PM	Tube furnace set to 1000
1/11/2011	10:29:52 PM	H2 valve closed
1/11/2011	10:29:52 PM	BCl3 valve closed
1/11/2011	10:29:52 PM	PH3 valve closed
1/11/2011	10:29:52 PM	SiCl4 pre valve closed
1/11/2011	10:29:52 PM	SiCl4 post valve closed
1/11/2011	10:29:52 PM	Main Vac valve closed
1/11/2011	10:29:52 PM	Bypass valve closed
1/11/2011	10:29:52 PM	Helium valve opened
1/11/2011	10:29:52 PM	Bubbler valve opened
1/11/2011	10:29:52 PM	Helium MFC set to  500.000000
1/11/2011	10:29:52 PM	H2 MFC set to  0.000000
1/11/2011	10:29:52 PM	BCl3 MFC set to  0.000000
1/11/2011	10:29:52 PM	PHl3 MFC set to  0.000000
1/11/2011	10:29:52 PM	SiCl4 MFC set to  0.000000
1/11/2011	10:29:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	10:29:52 PM	Tube furnace set to 0
1/11/2011	10:49:52 PM	Helium valve closed
1/11/2011	10:49:52 PM	H2 valve closed
1/11/2011	10:49:52 PM	BCl3 valve closed
1/11/2011	10:49:52 PM	PH3 valve closed
1/11/2011	10:49:52 PM	SiCl4 pre valve closed
1/11/2011	10:49:52 PM	SiCl4 post valve closed
1/11/2011	10:49:52 PM	Main Vac valve closed
1/11/2011	10:49:52 PM	Bypass valve closed
1/11/2011	10:49:52 PM	Bubbler valve closed
1/11/2011	10:49:52 PM	Helium MFC set to  0.000000
1/11/2011	10:49:52 PM	H2 MFC set to  0.000000
1/11/2011	10:49:52 PM	BCl3 MFC set to  0.000000
1/11/2011	10:49:52 PM	PHl3 MFC set to  0.000000
1/11/2011	10:49:52 PM	SiCl4 MFC set to  0.000000
1/11/2011	10:49:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	10:49:52 PM	Tube furnace set to 0
1/11/2011	10:49:53 PM	Run finished at 10:49 PM
1/11/2011	11:17:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	11:17:25 PM	Recipe started at 11:17 PM
1/11/2011	11:17:25 PM	H2 valve closed
1/11/2011	11:17:25 PM	BCl3 valve closed
1/11/2011	11:17:25 PM	PH3 valve closed
1/11/2011	11:17:25 PM	SiCl4 pre valve closed
1/11/2011	11:17:25 PM	SiCl4 post valve closed
1/11/2011	11:17:25 PM	Main Vac valve closed
1/11/2011	11:17:25 PM	Bypass valve closed
1/11/2011	11:17:25 PM	Bubbler valve closed
1/11/2011	11:17:25 PM	Helium valve opened
1/11/2011	11:17:25 PM	Helium MFC set to  500.000000
1/11/2011	11:17:25 PM	H2 MFC set to  0.000000
1/11/2011	11:17:25 PM	BCl3 MFC set to  0.000000
1/11/2011	11:17:25 PM	PHl3 MFC set to  0.000000
1/11/2011	11:17:25 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:17:25 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:17:26 PM	Tube furnace set to 0
1/11/2011	11:17:27 PM	Helium valve closed
1/11/2011	11:17:27 PM	H2 valve closed
1/11/2011	11:17:27 PM	BCl3 valve closed
1/11/2011	11:17:27 PM	PH3 valve closed
1/11/2011	11:17:27 PM	SiCl4 pre valve closed
1/11/2011	11:17:27 PM	SiCl4 post valve closed
1/11/2011	11:17:27 PM	Main Vac valve closed
1/11/2011	11:17:27 PM	Bypass valve closed
1/11/2011	11:17:27 PM	Bubbler valve closed
1/11/2011	11:17:27 PM	Helium MFC set to  0.000000
1/11/2011	11:17:27 PM	H2 MFC set to  0.000000
1/11/2011	11:17:27 PM	BCl3 MFC set to  0.000000
1/11/2011	11:17:27 PM	PHl3 MFC set to  0.000000
1/11/2011	11:17:27 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:17:27 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:17:27 PM	Tube furnace set to 0
1/11/2011	11:17:27 PM	Run finished at 11:17 PM
1/11/2011	11:17:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/11/2011	11:20:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	11:20:19 PM	Recipe started at 11:20 PM
1/11/2011	11:20:19 PM	Helium valve closed
1/11/2011	11:20:19 PM	H2 valve closed
1/11/2011	11:20:19 PM	BCl3 valve closed
1/11/2011	11:20:19 PM	PH3 valve closed
1/11/2011	11:20:19 PM	SiCl4 pre valve closed
1/11/2011	11:20:19 PM	SiCl4 post valve closed
1/11/2011	11:20:19 PM	Main Vac valve closed
1/11/2011	11:20:19 PM	Bubbler valve closed
1/11/2011	11:20:19 PM	Bypass valve opened
1/11/2011	11:20:19 PM	Helium MFC set to  0.000000
1/11/2011	11:20:19 PM	H2 MFC set to  0.000000
1/11/2011	11:20:19 PM	BCl3 MFC set to  0.000000
1/11/2011	11:20:19 PM	PHl3 MFC set to  0.000000
1/11/2011	11:20:19 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:20:19 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:20:19 PM	Tube furnace set to 0
1/11/2011	11:20:49 PM	Helium valve closed
1/11/2011	11:20:49 PM	H2 valve closed
1/11/2011	11:20:49 PM	BCl3 valve closed
1/11/2011	11:20:49 PM	PH3 valve closed
1/11/2011	11:20:49 PM	SiCl4 pre valve closed
1/11/2011	11:20:49 PM	SiCl4 post valve closed
1/11/2011	11:20:49 PM	Bubbler valve closed
1/11/2011	11:20:49 PM	Main Vac valve opened
1/11/2011	11:20:49 PM	Bypass valve opened
1/11/2011	11:20:49 PM	Helium MFC set to  0.000000
1/11/2011	11:20:49 PM	H2 MFC set to  0.000000
1/11/2011	11:20:49 PM	BCl3 MFC set to  0.000000
1/11/2011	11:20:49 PM	PHl3 MFC set to  0.000000
1/11/2011	11:20:49 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:20:49 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:20:49 PM	Tube furnace set to 0
1/11/2011	11:20:49 PM	Run finished at 11:20 PM
1/11/2011	11:20:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/11/2011	11:23:52 PM	Recipe started at 11:23 PM
1/11/2011	11:23:52 PM	Helium valve closed
1/11/2011	11:23:52 PM	BCl3 valve closed
1/11/2011	11:23:52 PM	PH3 valve closed
1/11/2011	11:23:52 PM	SiCl4 pre valve closed
1/11/2011	11:23:52 PM	SiCl4 post valve closed
1/11/2011	11:23:52 PM	Main Vac valve closed
1/11/2011	11:23:52 PM	Bypass valve closed
1/11/2011	11:23:52 PM	Bubbler valve closed
1/11/2011	11:23:52 PM	H2 valve opened
1/11/2011	11:23:52 PM	Helium MFC set to  0.000000
1/11/2011	11:23:52 PM	H2 MFC set to  500.000000
1/11/2011	11:23:52 PM	BCl3 MFC set to  0.000000
1/11/2011	11:23:52 PM	PHl3 MFC set to  0.000000
1/11/2011	11:23:52 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:23:52 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:23:52 PM	Tube furnace set to 0
1/11/2011	11:25:08 PM	Helium valve closed
1/11/2011	11:25:08 PM	BCl3 valve closed
1/11/2011	11:25:08 PM	PH3 valve closed
1/11/2011	11:25:08 PM	SiCl4 pre valve closed
1/11/2011	11:25:08 PM	SiCl4 post valve closed
1/11/2011	11:25:08 PM	Main Vac valve closed
1/11/2011	11:25:08 PM	Bypass valve closed
1/11/2011	11:25:08 PM	H2 valve opened
1/11/2011	11:25:08 PM	Bubbler valve opened
1/11/2011	11:25:08 PM	Helium MFC set to  0.000000
1/11/2011	11:25:08 PM	H2 MFC set to  500.000000
1/11/2011	11:25:08 PM	BCl3 MFC set to  0.000000
1/11/2011	11:25:08 PM	PHl3 MFC set to  0.000000
1/11/2011	11:25:08 PM	SiCl4 MFC set to  0.000000
1/11/2011	11:25:08 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:25:08 PM	Tube furnace set to 1000
1/11/2011	11:45:08 PM	Helium valve closed
1/11/2011	11:45:08 PM	PH3 valve closed
1/11/2011	11:45:08 PM	Main Vac valve closed
1/11/2011	11:45:08 PM	Bypass valve closed
1/11/2011	11:45:08 PM	H2 valve opened
1/11/2011	11:45:08 PM	BCl3 valve opened
1/11/2011	11:45:08 PM	SiCl4 pre valve opened
1/11/2011	11:45:08 PM	SiCl4 post valve opened
1/11/2011	11:45:08 PM	Bubbler valve opened
1/11/2011	11:45:08 PM	Helium MFC set to  0.000000
1/11/2011	11:45:08 PM	H2 MFC set to  500.000000
1/11/2011	11:45:08 PM	BCl3 MFC set to  3.000000
1/11/2011	11:45:08 PM	PHl3 MFC set to  0.000000
1/11/2011	11:45:08 PM	SiCl4 MFC set to  50.000000
1/11/2011	11:45:08 PM	Bypass solenoid MFC set to  0.000000
1/11/2011	11:45:08 PM	Tube furnace set to 1000
